31 May 2006 Simulation of electron scattering in thin films using Monte-Carlo method in discrete looses approximation
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Proceedings Volume 6278, Seventh Seminar on Problems of Theoretical and Applied Electron and Ion Optics; 62780I (2006) https://doi.org/10.1117/12.693208
Event: Seventh Seminar on Problems of Theoretical and Applied Electron and Ion Optics, 2005, Moscow, Russian Federation
Abstract
Problems of secondary electrons (SE) energy spectrum simulation are discussed in present article. It is shown that secondary electrons shoot energy spectrum (ES) simulated using discrete looses approximation coincides with Landau distribution function.
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S. S. Borisov, S. I. Zaitsev, E. A. Grachev, N. Ivanov, "Simulation of electron scattering in thin films using Monte-Carlo method in discrete looses approximation", Proc. SPIE 6278, Seventh Seminar on Problems of Theoretical and Applied Electron and Ion Optics, 62780I (31 May 2006); doi: 10.1117/12.693208; https://doi.org/10.1117/12.693208
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