Determination of subsurface structure parameters of a sample using secondary electrons energy spectrums

S. S. Borisov; S. I. Zaitsev; A. Bloshenko; T. Misutina

doi:10.1117/12.693212

31 May 2006 Determination of subsurface structure parameters of a sample using secondary electrons energy spectrums

S. S. Borisov, S. I. Zaitsev, A. Bloshenko, T. Misutina

Proceedings Volume 6278, Seventh Seminar on Problems of Theoretical and Applied Electron and Ion Optics; 62780L (2006) https://doi.org/10.1117/12.693212
Event: Seventh Seminar on Problems of Theoretical and Applied Electron and Ion Optics, 2005, Moscow, Russian Federation

Abstract

Using developed simulalion program based on Monte-Carlo method in discrete looses approximation (DLA) we carried out analysis of secondary electrons (SE) energy spectrums (ES). The possibility of determination of thickness and depth of subsurface structures using ES of SE is shown.

Citation Download Citation

S. S. Borisov, S. I. Zaitsev, A. Bloshenko, and T. Misutina "Determination of subsurface structure parameters of a sample using secondary electrons energy spectrums", Proc. SPIE 6278, Seventh Seminar on Problems of Theoretical and Applied Electron and Ion Optics, 62780L (31 May 2006); https://doi.org/10.1117/12.693212

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