31 May 2006 Determination of subsurface structure parameters of a sample using secondary electrons energy spectrums
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Proceedings Volume 6278, Seventh Seminar on Problems of Theoretical and Applied Electron and Ion Optics; 62780L (2006) https://doi.org/10.1117/12.693212
Event: Seventh Seminar on Problems of Theoretical and Applied Electron and Ion Optics, 2005, Moscow, Russian Federation
Abstract
Using developed simulalion program based on Monte-Carlo method in discrete looses approximation (DLA) we carried out analysis of secondary electrons (SE) energy spectrums (ES). The possibility of determination of thickness and depth of subsurface structures using ES of SE is shown.
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S. S. Borisov, S. S. Borisov, S. I. Zaitsev, S. I. Zaitsev, A. Bloshenko, A. Bloshenko, T. Misutina, T. Misutina, } "Determination of subsurface structure parameters of a sample using secondary electrons energy spectrums", Proc. SPIE 6278, Seventh Seminar on Problems of Theoretical and Applied Electron and Ion Optics, 62780L (31 May 2006); doi: 10.1117/12.693212; https://doi.org/10.1117/12.693212
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