29 January 2007 Fiber micro-vibration readout sensor based on MOEMS
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Proceedings Volume 6279, 27th International Congress on High-Speed Photography and Photonics; 627964 (2007) https://doi.org/10.1117/12.725507
Event: 27th International congress on High-Speed Photography and Photonics, 2006, Xi'an, China
Abstract
To measure the vibration of micro-structure, a scheme of sensor based on MOEMS (Micro-Optic-Electro-Mechanical System) with fiber-optic readout was proposed, and its mathematical model was deduced. Single-fiber readout structure and a micro-structure fixed in the front of the sensor were used. The micro-structure vibrated as the measured object moved, and its vibration caused the change of light intensity. The sensor detected vibration displacement by receiving the light intensity. As a result of single-fiber structure and parameters optimization of micro-structure, compared with other fiber readout structures, this system has the advantages of high sensitivity and miniaturization which is easier to match with fiber system because of single-fiber structure and parameters optimization of micro-structure. The response behaviors of the system to the piezoelectric ceramics excitation were studied through the experiments. And it could detect the vibration displacement of 0.18nm.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Rui Li, Rui Li, Wen Xiao, Wen Xiao, Dewen Liu, Dewen Liu, Yu Cui, Yu Cui, } "Fiber micro-vibration readout sensor based on MOEMS", Proc. SPIE 6279, 27th International Congress on High-Speed Photography and Photonics, 627964 (29 January 2007); doi: 10.1117/12.725507; https://doi.org/10.1117/12.725507
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