29 January 2007 Research on surface topography of MEMS micromirror based on 3D Weierstrass-Mandelbrot function
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Proceedings Volume 6279, 27th International Congress on High-Speed Photography and Photonics; 62797A (2007) https://doi.org/10.1117/12.725945
Event: 27th International congress on High-Speed Photography and Photonics, 2006, Xi'an, China
Abstract
Micro-mirror is the key structure of MEMS optical switch, Digital Mirror Display (DMD) and variable optical attenuators. Surface roughness plays a crucial rule in reflectivity, insertion loss, and all kinds of surface forces. In this paper, a silicon based non-silicon MEMS optical switch is fabricated and the topographies of various micro-mirror surfaces are measured by Scanning Tunneling Microscope (STM). After fractal analysis, a three-dimensional Weierstrass-Mandelbrot function is applied to simulate the topography of different surfaces. The result shows that the surface of MEMS micromirror which fabricated by metal sputter has low anisotropism and the W-M function is very efficient in creating models and is very useful in analysis the topography of MEMS surface.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yuan Luo, Yuan Luo, Yi Zhang, Yi Zhang, Xiaodong Xu, Xiaodong Xu, } "Research on surface topography of MEMS micromirror based on 3D Weierstrass-Mandelbrot function", Proc. SPIE 6279, 27th International Congress on High-Speed Photography and Photonics, 62797A (29 January 2007); doi: 10.1117/12.725945; https://doi.org/10.1117/12.725945
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