The paper describes traceable nanometrology based on a nanopositioning machine with integrated nanoprobes. The operation of a high-precision long range three-dimensional nanopositioning and nanomeasuring machine (NPM-Machine) having a resolution of 0,1 nm over the positioning and measuring range of 25 mm x 25 mm x 5 mm is explained. An Abbe offset-free design of three miniature plan mirror interferometers and applying a new concept for compensating systematic errors resulting from mechanical guide systems provide very small uncertainties of measurement. The NPM-Machine has been developed by the Institute of Process Measurement and Sensor Technology of the Technische Universitaet Ilmenau and manufactured by the SIOS Messtechnik GmbH Ilmenau. The machines are operating successfully in several German and foreign research institutes including the Physikalisch-Technische Bundesanstalt (PTB), Germany. The integration of several, optical and tactile probe systems and nanotools makes the NPM-Machine suitable for various tasks, such as large-area scanning probe microscopy, mask and wafer inspection, nanostructuring, biotechnology and genetic engineering as well as measuring mechanical precision workpieces, precision treatment and for engineering new material. Various developed probe systems have been integrated into the NPM-Machine. The measurement results of a focus sensor, metrological AFM, white light sensor, tactile stylus probe and of a 3D-micro-touch-probe are presented. Single beam-, double beam- and triple beam interferometers built in the NPM-Machine for six degrees of freedom measurements are described.

Micro-scale machining performed in a mechanical manner is an ultra-precision material removal process to achieve micron form accuracy and a few nanometer finish. It has gained increasing importance in the manufacture of optical, mechanical, biomedical, and electronic components with intricate details in many industry and consumer products, both as a means to produce final products and to create dies and molds for further mass production. The backbone of science and technology for the success of machining at such fine length scales hinges on the understanding of microstructual machining mechanics, precision control of machine tool motions, miniaturization of cutters, miniaturization of machine tools, and the availability of high resolution metrology. This paper examines a number of recent research developments at Georgia Tech in these areas. On microstructual mechanics, cutting at submicron depth to control brittle-ductile transition of material will be discussed. On precision machine control, compensation of micrometer multitooth runout error through the chip load servo will be illustrated. On cutter miniaturization, the concept of magnetic single-grit abrasive as a micro cutting tool for submicron dimensional accuracy will be presented. On machine tool miniaturization, the downsizing of machining center and its associated benefits on precision will be elaborated. On metrology, a micro laser-based system and acoustic emission systems are presented for the measurement of micro cutting tool locations. The presentation of these topics will focus on the underlying fundamentals of fine scale machining and their implications toward ultra-precision engineering and micro/nano manufacturing.

The novel results of the R & D activity of TDI SIE SB RAS in the field of the optical measuring technologies, as well as laser technologies for solving safety problems are presented. To measure the rocks stress and to prevent the mountain impact, as well as for basic investigations, a set of optical-electronic deformers and systems was developed and produced. For permanent noncontact bearing position inspection of oil-drilling platforms on Sakhalin coast (Russia) we have developed optical-electronic method and system SAKHALIN with cumulative traveled distance (3 km) measurement error less than 0.03 %. Multifunctional laser technological system LSP-2000 equipped by two Nd-YAG lasers was developed for cutting, welding and surface micro profiling with ablation process (working range of 3 × 2 × 0.6 m³, positioning error less than 10 mkm). Safety of Russian nuclear reactors takes 100 % noncontact 3D dimensional inspection of all parts of fuel assemblies, including grid spacers. Results of development and testing the specialized high productive laser measuring machine, based on structured illumination, for 3D inspection of grid spacers with micron resolution are presented. Ensuring the safety of running trains is the actual task for railways. Using high-speed laser noncontact method on the base of triangulation position sensors, TDI SIE has developed and produced automatic laser diagnostic system COMPLEX for inspection of geometric parameters of wheel pairs (train speed up to 60 km/hr.), which is used successfully on Russian railways. Experimental results on measuring and laser technological systems testing are presented.

This paper forwards a low power grating detection chip (EYAS) on length and angle precision measurement. Traditional grating detection method, such as resister chain divide or phase locked divide circuit are difficult to design and tune. The need of an additional CPU for control and display makes these methods' implementation more complex and costly. Traditional methods also suffer low sampling speed for the complex divide circuit scheme and CPU software compensation. EYAS is an application specific integrated circuit (ASIC). It integrates micro controller unit (MCU), power management unit (PMU), LCD controller, Keyboard interface, grating detection unit and other peripherals. Working at 10MHz, EYAS can afford 5MHz internal sampling rate and can handle 1.25MHz orthogonal signal from grating sensor. With a simple control interface by keyboard, sensor parameter, data processing and system working mode can be configured. Two LCD controllers can adapt to dot array LCD or segment bit LCD, which comprised output interface. PMU alters system between working and standby mode by clock gating technique to save power. EYAS in test mode (system action are more frequently than real world use) consumes 0.9mw, while 0.2mw in real world use. EYAS achieved the whole grating detection system function, high-speed orthogonal signal handling in a single chip with very low power consumption.

In this paper, a new kind of angular high precision displacement based on principle of vernier caliper is proposed. This displacement is sourced from the idea of vernier caliper. The longer arm of vernier caliper with a linear scale and the L-shaped sliding attachment with a vernier are replaced by an inner round part and outer round part with reticle around them. The numbers of reticle around inner part is different from that of outer part. Using the reticle number difference between two parts having relative motion, in the condition of the similar reticle, there exist changes of some physical parameter among the reticles. It can gain more pulse signal. In some cases, the numbers of pulse signal is approximately equal to the product of the two numbers of reticles around inner and outer round parts, which has identical consequence of pulse interpolation or frequency doubling. Through which the goal of improving resolution is achieved. The design idea, the working principle, the signal analysis, the precision analysis and the experiment result of this angular displacement sensor are introduced. The research result shows that thickness, spacing and number of reticles can directly affect the number, amplitude, wave shape, accuracy and other characteristics of the pulse signal. It will play an important rule in improving the traditional grating type angular displacement sensor technology.

A novel type of displacement sensor named time grating is introduced for measuring space with time. Multi-position probes measuring method is used to separate the non-linearity error of time grating, and Fourier series harmonic wave correction method is proposed to correct the error by software. Experiment results coming out from applications conform the remarkable effectiveness of these methods. A time grating displacement sensor with accuracy of ±0.8" is developed. Test results show that high-precision measurement is achieved without high-precision manufacture. The realization of error self-correction endows time grating sensor with intelligence.

By present, the calibration of dimensions in nano scale is being paid more and more attentions. One-dimensional grating standard with pitches in nano-scale is being proposed by the CCL-WGDM 7 to be one of the five key comparison parameters in the emerging field of nanometrology. In the pitch calibration of grating standard, Gravity Center Method and Zero-Cross Points Method are proposed. The two methods are analyzed and simulated under different conditions. Based on the actual measurement data obtained by AFM, the two methods are used and the best value is determined. The results in the paper are useful to pitch calibration in nano scale.

A new miniature nanometer interferometer using grating Doppler effect is developed. The principle of this interferometer can be attributed to the phase information encoded by the ±1st order diffractive light beams. Properly interfering these two light beams leads to modulation similar to Doppler frequency shift, which can be translated to displacement measurement via phase decoding. Because of the measurement standard of grating interferometer system is the grating pitch, compared to the commonly used laser interferometer, the diffractive grating system reduces the environment influences on measurement accuracy. The calibration experiment between grating and HP5529A has been implemented. The measurement results show this grating interferometer measurement system is applicable for higher accuracy in long stroke.

In this paper, a set of experimental equipment is outlined which is designed to eliminate temperature change influence in stress measurement. A Fiber Bragg Grating (FBG) is fixed to a specially-structured cantilever, then the load brought to beat at the free end of cantilever. As the load exerted to the cantilever is changed, the stress of FBG changes. From the experiment, we can see that at the beginning of distortion caused by the load, the center wavelength of fiber grating changes, but the chirp effect is not obvious. As the load increases, the spectrum of reflecting peak becomes wider, and the chirp effect becomes more obvious, then two reflecting peaks appear, and the distance of two center wavelengths increases as linearity. When weights are added to 200g, two center wavelengths are 1548.25nm and 1548.43nm and the distance of them is 0.18nm. Experimental results indicate that the distance of two reflect peaks changes in linear relationship with the increasing of load on the free end of the cantilever, and the linearity is up to 0.96. Using this way to package FBG, the cross-sensitivity of stress and temperature can be conquered, and the error caused by temperature change in stress measurement can be eliminated. Therefore, the stress measurement can be realized by one fiber grating.

In this paper, the principle to generate the moving coordinate in time grating displacement sensor is analyzed. In order to simplify the structure of the time grating sensor and make its manufacture more easily, its fluctuation equation is analyzed and the relation and distinction between electric traveling wave and magnetic traveling wave are discussed. Then a new method to generate traveling wave is proposed based on these discussions. The method is employed with its corresponding mechanical structure to form a new type time grating sensor. Experimental results show that the sensor can generate correct signal and the method is feasible. Thus the traditional electrical machinery method can be replaced by a new method to generate the moving magnetic field. This new method can simplify the manufacture process greatly.

This paper analyzes the mechanism of the traditional grating structure sensor and lists some disadvantages such as low resolution and weak anti-interfere. Aiming at these disadvantages, one innovative thought of "measuring space by time" is proposed. In this thought the displacement can be expressed by the time, and the time can be obtained by the method of high frequency pulse interpolation. The time measurement is very precise, so the displacement measurement would has high precision. The single tooth time grating displacement sensor is designed based on the thought. The single tooth time grating initially realizes the thought, but the effectiveness is not very ideal. Another design project, which is based on the rotary magnetic field in the motor, is presented. The sample for field type time grating has been designed. The experimental results coming out from applications confirm the validity of the proposed method.

Time grating displacement sensor realizes high precision measuring by counting some certain time pulses. Generating a travelling wave, which is related to the measured displacement, is a key tache in measuring process of time grating. Three-phase winding is used to generate travelling wave in field type time grating sensor, but uneven distribution of the winding may arouse measurement error. Tooth-grating structure is adopted to generate travelling wave in differential grating type time grating sensor, but the precision of this type sensor is very sensitive to machining precision of teeth. A new method to generate travelling wave is firstly proposed in this paper. This method is based on transformer theory with varying coupling coefficient. Employing a two pairs of face gears and two transformers structure, the sensor converts the change of rotator's displacement into the varieties of two transformers' coupling coefficient. Then coupling coefficient varieties cause the changes of signals' amplitude in both transformers' secondary coils. When the signals feeding to the two primary coils are two sine waves which have a 90° difference in phase and the positions of two pairs of face gears have a half tooth difference in space, the two signals induced by secondary windings can be added up and generate a travlling wave which is related to the displacement of rotator. According to this principle a novel type of time grating sensor is developed. Experiment results show that the correct signal can be generated and the new time grating sensor can get higher original precision.

A new method "Pretreatment and cycle stream of control" is raised in this paper. It has synthesized the characteristic of software and hardware, and has succeeded in the problem of real time in process of measurment and control by computer had been solved. this core idea of the project research is: the hardware electric circuit cycle in the space region which is distributed to form chain and cycle ( in a nested way ) + the software sentence cycle in the time region which is distinguished by scales == the real time controlled cycle controlled cycle of Pretreated control stream.

In the research and development of multi-parameter precision detecting system, various parameters need to be measured (such as length, diameter, surface roughness and so on). We not only measure some parameters statically but also measure others dynamically and calculate others (such as volume, density) using some detected parameters. At the same time, this system need higher precision and higher measuring speed. We propose a new detecting idea for this system--detecting devices in dynamic, module and time-sharing. And we design and optimize multi-parameter high precision measurement system employing the method. This idea includes three parts: the first part is dynamical part. We can make system more stability and more continuity in high detecting speed. The second part is module part. We can settle on a solution to measure similar parameters and make system structure more reasonable and reduce error factors. The third is time-sharing part. We solve the problem how to allot time to every parameter and make every measurement part and its software tie in. The detecting idea has been employed to design and optimize several multi-parameter precision detecting systems. Now these systems are running successfully in workshop.

Usually a capacitive displacement transducer (CDT) is made by printed-circuit-board (PCB) technology, so the reduced pitches of electrodes are limited by PCB technology and lead wire design, and the increase of its resolution, too. If a line array source replaces the transmitting electrodes of the CDT, a scale grating replaces the scale electrodes and a detector replaces the pick-up electrode of the CDT and also increase its number of the subdivision, the solution could be greatly improved on condition that the mathematical model of the CDT is maintained. Grating technology is organically combined with CDT technology. The basic operation principle of the system is as follows: a linear array source has several groups and every group has 8 light cell (organic light-emitting diode (OLED), or Liquid Crystal on Silicon Display (LCoS). (these line array sources are required to determinate speed response). The pitch of the cells is w. Every cell emits a light signal if driven by a digital signal. The pitch of the scale grating is W (=8w). The transmission (or reflection) characteristic function of the scale grating is T_i(x). After I_i(t) passes through the scale grating and is modulated by the displacement x of the scale grating, the total intensity I(x,t) is obtained. The photoelectric detector receives I(x,t) and transforms it into an electric signal. Subsequently the signal is demodulated and filtered, thus the fundamental harmonic of I₁(x,t) is obtained. It is obvious, that the phase of I₁(x,t) has a linear relation with x. After processing the phase demodulation circuit and the MPU, the displacement x of the scale grating is obtained.

The design techniques of actuating signal source in capacitive displacement transducer measurement system is used for designing a group of multiphase modulation signal source, which generates the multiphase linear light source actuating signal for grating measurement system, after the emitted multiphase modulating light signal is modulated by a scale grating, it is received by a photoelectric component and a compound electrical signal is obtained. Another electrical signal is obtained after processed by circuit, whose frequency is same as the fundamental frequency of actuating signal source, the movement distance x of scale grating can be obtained by detecting the change of phase difference between two electrical signals. Sub-micron or nanometer-level measurement resolution is reached by organically integrating the capacitive displacement transducer and grating measurement technology, by increasing the subdivision number of phase detecting circuit, and by decreasing the point distance of linear light source.

This paper introduces the realization of half-integral frequency divider on the principle and gives the circuit schematic diagram. Based on the half-integral frequency divider, a design method of a general frequency divider is given by controlling the gating of exclusive-OR gate. Even, odd and decimal frequency division is realized using the model of the general frequency divider, which is designed by use of VHDL hardware description language and the schematic diagram input mode with the development software of MAX+plus II. The low layer VHDL descriptions and the designs of top layer schematic diagram of the frequency divider are presented in the paper. To validate the design, the designed dividers which have different coefficient of frequency division are simulated, and the figures are presented. Results of experiment in the device of ALTERA Corporation's EPF10K20 proof much more that the general frequency divider can realize a several of frequency division functions.

A high-resolution displacement sensor based on multiple feedback effect of birefringence dual frequency lasers has been presented and demonstrated. When the system operates in very strong feedback regime with asymmetric feedback induced by incline of an external feedback reflector in an orthogonal polarized dual frequency laser, the modulation frequency of the laser intensity is seven times higher than what the conventional optical feedback system can achieve, due to multiple feedback effect. A fringe shift will correspond to a displacement of a fourteenth wavelength of the external reflector. The intensity transferring periodically between the two frequencies is studied. One period of intensity transfer can be divided into four states: o-light, o-light and e-light, e-light, and no light, and each polarization state corresponds to λ/56 displacement of the external reflector. According to the appearing sequence of the four states, the movement direction of external reflector can be discriminated. Thus, a novel displacement sensor with a resolution of being as high as 11.3 nm, as well as function of direction discrimination, is believed to achieve.

A novel method of the measurement of in-plane displacement is presented. This method includes a heterodyne light source, a moving grating and a lock-in amplifier for phase measurement. The phase variation which resulted from the grating movement is measured by an optical heterodyne interferometer. The short and long displacement can be measured by our method. The theoretical resolution is about 1 pm. If considering the high frequency noise, the measurement error or resolution is about 0.2 nm yet.

An optical structured illumination of 3D object as a light band method of wear measurement and defects detection of a contact wire network on railways, tram, trolleybus lines and similar systems of vehicles electro-supply is presented. The experimental device can extract main technological wire parameters, as its remaining height with rms value down to 0.1 mm. Also the cross-sectional area of the wire can be measured with rms area noise value of 1.5mm², which is sufficient for confident decision-making related to the automatic wire wears and defects.

A new method of laser range finder for precise large scale metrology is proposed. A chirped laser pulse with femtosecond durations is selected to work as the laser resource for the pulsed lidar to obtain the distance information. The chirped pulse's time domain and frequency domain specification are fully used in the double modulation, which combines the time-of-flight methods' advantages in distance measurement, such as high resolution, large measuring range and without measuring reference. An opportunity of absolute large scale metrology with the high accuracy is shown.

A new laser range finding method using direct sequence spreads spectrum (DSSS) and phase-shift keying (PSK) modulation is described in this paper. Comparing with pulse, phase-shift and other normal methods, it provides more benefits such as improving receiver sensitivity and avoiding range ambiguity, due to the property of long periodic pseudo noise (PN) sequence. The operation theory and simulation result are also introduced.

This article focuses on the circuit implementation of a mixer and phase difference measurement for laser range finding systems. It will introduce simply the principle of the laser range finding system, which is the basis of the electronic circuitry design. The modulated laser lights of two different frequencies are mixed and the phase difference is detected in order to measure the range. The method of measuring the range is to use the mixer and the phase difference detector. The new and high precision IC that has a high quality makes the circuit simple and reliable. The circuit of the mixer and the phase difference detector for laser range finding systems is designed using AD608 and AD8302 chips.

This paper describes a technique for the measurement of deep sub-micron flying height based on intensity interferometry, focuses on the introduction of operating principles, system configuration and image visual feedback techniques. Because the flying height is super low, micro pitch or roll of the slider will lead to measuring error. Thus a constant relative position between the optic spot and the slider should be assured. Imaging processing technique is used to obtain the coordinates of both the slider and the optic spot. A detection algorithm of the center of circle is detailed in this paper.

Modern manufacturing increasingly places a high requirement on the speed and accuracy of Coordinate Measuring Machines (CMMs). Measuring speed has become one of the key factors in evaluating the performance of CMMs. In high speed measuring, dynamic error will have a greater influence on accuracy. This paper tests the dynamic error of CMM's measuring system under different measuring positions and speeds using the dual frequency laser interferometer. Based on measured data, the modeling of synthetic dynamic errors is set up adopting the dual linear returns method. Comparing with the measured data, the relative error of modeling is between 15% to 20%, the returns equation is prominent at α=0.01 level, verified by "F". Based on the modeling of synthetic dynamic errors under different measuring positions and speeds, the measuring system dynamic error of CMMs is corrected and reduced.

With the reduction in dimensions of products in the last decade, the need for highly accurate dimensional inspection and measurement increases, which requires down scaled measuring tools. The key element for a powerful down scaled dimensional measuring tool coordinate measuring machine is the downscaled probe. In order to satisfy the ongoing increasing demand for highly accurate geometrical measurements on small parts and small structures, a new measuring probe having high sensitivity and small geometrical dimension with low contact forces needs to be developed. In this paper, a novel probing system, which combines a FBG (Fibre Bragg Grating) embedded optical fibre tactile probe with an optical sensing technique, is proposed for down scaled 3D micro-CMMs. The Bragg wavelength shifts with the strain developed along the fibre once the fibre touches the surface of the part. With high-resolution interferometric wavelength demodulation technology, a resolution of 5nm could be achieved by the FBG integrated system. With the sensor elements integrated into the probe tip directly, the system sensitivity can be increased significantly for 3 dimensional measurements.

Based on parallel optical detecting principle, a contact CMM probe is proposed. A 2D light source array produced by the micro-optic component is used to form parallel micro-astigmatism system. When the probe comes into contact with workpiece, the reflecting point of each astigmatism path was deflected. The deflect information can be got through the change of the light intensity and the probe position can be obtained finally. It combines the advantages of optical non-contact method and mechanical contact one. The probe could provide trigger signal and zero cross detection, it also could obtain XYZ micrometer signal. Compared with the traditional electric trigger probe, the probe is simple in the mechanism with high precision, and it is easy to realize the micromation and integration. The construction and working principle of the contact CMM probe are investigated. Furthermore, experiment result is obtained, which accords with theory analysis. It indicates that parallel optical detecting method is applicable in contact CMM probe.

To calibrate step gauges, a new linear measuring system was improved in our laboratory that combines the Leitz universal measuring machine of the 1960s with a laser interferometer. This paper introduces the measurement method and the calculation of the expanded uncertainty of the measurement. The expanded uncertainty of the system is (0.3 + L) μm at k=2, where L is given in meter.

This paper presents the achievement of a China NSFC project. The Laser Tracker System (LTS) is a portable 3D large size measuring system. The measuring conditions such as time and temperature can greatly affect the measuring accuracy of LTS. This paper pays a great attention to study how the time and temperature affect the measuring accuracy of LTS. Coordinate Measuring Machine (CMM) is employed as a high-level measuring instrument to validate LTS. The experiments have been done to find how the time and temperature affect the measuring accuracy of LTS. The experiments show the LTS can work well with the highest measuring accuracy just after three-hour warm-up. However, the LTS becomes unstable and the measuring accuracy decreases after 10 hours. The LTS needs calibration and compensation every 10 hours. The experiments show that the measuring error can be up to 29.6μm when the measuring temperature is 30.5°C even if the measuring error is less than 5.9μm while the temperature is between 20°C and 23.8°C. The research provides a very useful guidance for application of LTS.

Accuracy Distribution and Determination is one key step in instrument design and it influences manufacturing cost and final accuracy of machine. So, the analysis about instrument accuracy needs to be paid more attention before manufacturing. Flexible CMM has attracted lots of eyes recent years in the world. This paper gives the analysis result of the flexible CMM. At first, a typical flexible CMM is briefly introduced and the system combines 6 angle encoders and 2 measuring arms and one probe. Secondly, the measuring mathematic model is derived and the error of the parameters of the system is analyzed base on the model. Thirdly, the accuracy of the key parameters of the system have been distributed and determined according to the analysis. Finally, the theory has been approved in a practical flexible CMM. So, the theory of accuracy distribution and determination is the basement of design and manufacturing and it plays a great role in the instrument design.

Digital Holographic Microscopes (DHM) allows the capture of all the information necessary to provide 3D phase measurements with a nanometer vertical resolution in a single image acquisition. DHM images provide measurements of the surface topography which can be used for surface analysis, roughness measurements for example. In this paper we present roughness measurements on micro-balls of different sizes for which numerical procedures are applied for form factor and waviness removal. DHM thus permits quantitative measurements of the roughness on a 2 dimensional area allowing enlarged information compared to common profilometers. Mean roughness of 5 to 30 nm are measured and compared to values obtained by a profilometer.

White-light interferometric techniques and image processing techniques have been widely applied in measurement of surface profiles. A new method based on two technologies to achieve the optical non-contact shape measurement for spherical and aspherical surfaces is presented in this paper. This method utilizes the pixels of the image to locate the points of surface and obtains the surface height information by a vertical scanning white-light interferometric system. A set of a three-dimensional stage composed of a fine and coarse two-step vertical driver, and a two-dimensional horizontal driver is designed to enlarge the measurement area and the vertical scanning range. The measurement precision depends on the the performance of the interference microscope and the three-dimensional stage, so the influence of the interference microscope on the measurement result and the precision of the stage are analyzed. In the stage, a grating sensor is used to monitor the scanning process and the scanning information is fed to driving circuit to compensate for the errors. Additionally, experiments are carried out and correlative results are also shown.

In the optical non-contact measure fields, the white light interferometry technique is well-known. The measure resolutions of vertical and horizontal direction are determined by motion mechanism and grabbed images, respectively. Therefore, to permit measurement resolution of white light interferometry in 3D profile is very important. In this paper, a white light interferometric measurement technique that combines vertical scanning and phase shifting is proposed. High resolution of the vertical scanning technique can grab the images of short pitch displacement. The relationship between interference fringe and changed frequency of these images are solved by the FFT. Then, the interference fringe's center is computed by band-pass filter and maximum power position. The phase shifting is based on five-frame algorithm to acquire fringe order through vertical scanning. In the experiment result, first was used the grating that had calibrated by commercial instrument Talysurf CCI 6000 to calibrate the experiment implement longitudinal resolution, second was measured the roughness calibration gauge of Model SS-NS94/ No. N20674 /Ra 3.0μm. The results show that the resolution is arrived 1nm, it was quite obvious improving the traditional mechanic.

Taiji image originated from ancient China. It is not only the Taoism emblem but also the ancient graphic presentation sign to everything origin. It either has a too far-reaching impact on traditional culture of China, or is influencing the development of current natural science. On the basis of analyzing the classical philosophic theory of two-dimensional (2-D) Taiji image, we developed it into the model of complex interior surface-three-dimensional (3-D) Taiji ball, and explored its possible applications. Combining modern mathematics and physics knowledge, we have studied on the physical meaning of 3-D Taiji ball, thus the plane change of original Taiji image is developed into space change which is more close to the real world. The change layers are obvious increased notably, and the amount of information included in this model increases correspondingly. We also realized a special paper 3-D Taiji ball whose surface is coved with metal foil by means of laser manufacture. A new experiment set-up for measuring micro displace has been designed and constituted thus the relation between capacitance and micro displacement for the 3-D Taiji ball has performed. Experimental and theoretical analyses are also finished. This models of 3-D Taiji ball for physical characteristics are the first time set up. Experimental data and fitting curves between capacitance and micro displacement for the special paper Taiji ball coved with metal foil are suggested. It is shown that the special Taiji ball has less leakage capacitance or more strengthen electric field than an ordinary half ball capacitance. Finally their potential applied values are explored.

This text gives a deep study for the relationship between field intensity of radiation interference and test distance within a same radiator. Through basic theory study of radiation features of both electric doublet and magnetic doublet, as well as analysis and comparison of practically measured data, problem of big difference between calculated results out of E (symbol) 1/r and practically measured data is solved. The conclusion is the field intensity out of a single field source would decrease at Power 1.5 ~ 11.84 as Distance r increases but not decrease at Power 1, and the decreasing power is relative to the polarization style of field intensity.

As it is known the mining of oil and gas offshore is carried out using the drilling platforms, which are extremely massive and inert. In order to avoid excessive stresses on platform, which is highly inertial object, it consists of few large parts (normally base and legs). Four friction pendulum bearings are used for mechanical link between the base and legs. The bearings functionality is to provide the protection of the platform from all possible mechanical loadings on the legs that might affect the base with the drill and other sensitive equipment. Mechanical loadings include different seismic movements, ice shifts, mechanical loadings during the drilling, heat expansion stress, etc. Bearings are worn out after certain distance traveled and have to be replaced when the movement resource is over. The most important parameter, which allows estimation the bearing resource, is measuring the cumulative distance traveled by the bearing from the beginning of its service with the relative accuracy better then 0.01%, and absolute displacement at ±350 mm range with accuracy better then 1 mm. For this purpose the automatic optical-electronic system for measurements of bearings movements was developed. Its main aim is continuous noncontact measurement of the bearing location and calculation of the total distance traveled by the bearing for any defined time period. Measuring principle of the system is based on optical image processing. The passive part of the system (optical target) is fixed on one part of construction while active part - a field measurement sensor (FMS) is installed on another part of construction that moves relative to the first one. The FMS continuously captures and processes the image of optical target. On the FMS output, after processing, the relative displacement between FMS and Optical Target is obtained with high degree of accuracy. The system was certified as a measuring tool as well as for the use in explosive environments (for gas and oil industry). It is designed for continuous 24-hours operation during 30 years.

The objective of this research is to develop a non-contact measurement system for micro-scale 3D geometry. The core of the system is based on Shape-from-Focus method. Corresponding digital images were taken at different heights with predefined step interval. The images taken were enhanced by image processing techniques including discrete Gaussian filtering and histogram equalization. The degree of the focused image was quantified and, then the height of each pixel was determined with Gaussian Interpolation. 3D geometry model of the specimen can be reconstructed. The system developed was verified with a standard sphere of radius 225 μm. The result gave the average radius of 221.56 μm with the standard deviation 8.95 μm. Feasibility of the measuring system was confirmed with satisfactory precision level.

This paper presents a new way for online multi-dimensional measurement of complex workpieces, which is based on the stereo computer vision. We also advanced a new algorithm to obtain the disparity image for the image matching. In this algorithm we combine the pyramid image-matching strategy and the means of dynamic programming, and then apply the sub-pixel matching. Thus, the characteristic lines and circles of the measured workpiece are reconstructed in the image space. Using Hough transform, we obtain the information of the circles and the lines in the measurand. Then we get the sizes required. Compared with those obtained by CMM, the results have quite high accuracy.

2-D vision approach used to measure dimensions of complex cross-section of an object is presented in the paper. Considering the complexity of profile in cross section, some methods for edge detection and geometric elements recognition are studied. The means that can acquire a fine boundary image is adopted. A special approach for recognizing all geometric elements in image is presented. The recognition is processed by matching elements in image with corresponding elements in a standard graph. The standard graph is drawn according to the machine drawing. The measurement for total parameters is accomplished at the same time. The measure precision is ± 0.05mm.

Focus detection method is one of the primary non-contact measurement methods of surface topography. However, the measuring range of traditional focus detection method is limited because the volume motor is adopted in the focus servo system. The traditional method has inevitable non-linear error and other measurement error caused by the volume motor. This paper presents a new non-contact profilometer based on an improved Foucault focus detection method. The non-contact profilometer is a closed loop control system, which changes the traditional moving volume motor scanning system into the moving platform scanning system. Without adopting volume motor, the non-contact profilometer has large measuring range, high resolution and more measurement parameters. When the surface of workpiece is measured, the undulation of microcosmic surface topography leads to the focusing error signal continuously. According to the focusing error signal, the computer controls the piezoelectric actuator and the Z direction motor to drive the platform to move vertically, which ensures that the focus is always on the surface of workpiece and the focusing error signal is zero. The diffraction grating displacement sensor measures the vertical displacement of the workpiece, then the displacement signals is processed by the characterization software as the results of the measurement. The non-contact profilometer can measure roughness, waviness, shape error of different curved surfaces precisely.

3D surface reconstruction plays an important role in reverse engineering, which can be implemented by machine vision techniques. In the techniques, the calibration of the intrinsic and extrinsic parameters of a camera is very crucial to ensure the 3D reconstruction accuracy. This paper will present a neural network method for the calibration. This method uses weight matrixes to calculate the transformation matrix of the 3D points in a world frame against their corresponding 2D image pixels, and then the intrinsic and extrinsic parameters can be readily extracted from the matrix. The experimental results have shown that the method can obtain a precise calibration result.

A scanning method to measure the convexity of thin-gauge roll castings is brought forward. With a laser scanner that is based on the difference measurement theory of a pair of laser beams, the thickness distribution is measured and the convexity is computed. In this paper, the system's structure with an equipment of high-precision sheet convexity measurement with lasers is introduced. The key technologies to improve the measuring precision of the measurement system are studied, which includes error avoidance and error restraint. In sheet thickness measurement systems with lasers, the vibration of the C-frame, which is excited by the vibration of the working environment, could cause the change of precision of the sensor position in the system, and affect the system's measuring precision. In this paper, by use of finite element method and modal analysis, the structure optimization of the C-frame is introduced. By the simulation and optimization, the natural frequencies are increased. At the same time, the key modes which can arouse sympathetic vibration are avoided. By optimization, the structure of the C-frame can be adapted to industrial environments and guarantees the measuring precision of the equipment. By use of the wavelet multi-resolution analysis method, the convexity measuring signal is analyzed. Errors in the convexity measuring signal are decomposed into single components and each of the components is in a different frequency channel and indicates a different error signal. After a restraining algorithm is used, the wavelet restoration of valid components of the measured signal is carried out and an error restraint for the convexity measurement is realized. The experiment shows that the methods studied are effective.

With the emergence of the IEEE1451 standard, the development of smart sensor becomes more important to the manufacture of sensor. IEEE1451 standard is a set of standards that were established to address smart sensor systems and to develop a comprehensive set of sensor and software protocols. This standard defines a table of parameters that are held in the EEPROM of the sensors, named Transducer Electronic Datasheet (TEDS). TEDS can store much information of the transducer such as manufacture ID, model number, serial number, version letter, user date and calibration date and so on. In this paper, IEPE accelerometer is adopted as the piezoelectricity sensors in which TEDS is embed. DS2431 1024 bits 1-Wire programmable read-only memorizer is taken as the memorizer of TEDS date. DS9097U 1-Wire COM serial adapter is adopted to connect the 1-Wire device and RS-232 of the PC to transfer date between them. At last, use LabVIEW application to read and write the date of TEDS on the computer. The basic information of sensors can be written into TEDS and also can be changed through LabVIEW application. The main purpose of the development platform is to accomplish the read and write of the TDES data based on the IEEE1451 standard by using LabVIEW application. Then the sensor can be made to be smart, and the main task of the development platform is to compile program to read and write the information of TEDS.

Optical devices are playing important roles for all optical network(AON) and micro electro mechanical system (MEMS) technology is a core technology for optical devices because of its compactness, high integration level and cheapness. MEMS micromirror is a key structure for some kinds of MEMS devices such as optical switch, variable optical attenuator (VOA) and so on. The characteristics of the MEMS optical micromirror will determine the performances of the devices. In this paper, some important optical and mechanical parameters of the novel silicon-based non-silicon MEMS micromirror are measured, especially the torsion angle which is tested by using digital image processing. The testing data presents that the surface topography of the novel micromirror is smoother than that of poly-silicon micromirror and the reflective characteristic is also well. After building a micromirror angle testing digital image processing system, the rotating angle of the micromirror is measured and the result shows that the micromirror could be rotated with an angle based on theoretical analysis.

This paper presents a novel approach that adopts full-orientated two-layer fan-beam optical sensor to measure the particle velocity. The scanning light source emit a 50° lamellar fan-beam in turn through the gas-solid two phase flow, and the projection data resulting extinction effect of solid particles are detected at the same time. The profile optical projection data of measured flow field of the two layers can be obtained through being stimulated array light source and detecting light signal at multiple angles in space, and the vertical velocity field can be reconstructed during the course of measurement in terms of two-dimension cross-correlation and backprojection algorithm. In this paper, the design of the sensor including spatial arrangement of the structural parts and basic principle are introduced, the mathematical model utilized for measuring the particle velocity is presented and the experimental results are shown. It provides a new means to reconstruct rapidly velocity field of the gas-solid two-phase flow.

A new type of piezoelectric resonance quartz crystal temperature sensors which exhibits a high precision and a good stability has been developed. A Y-cut (4.05°) quartz resonator operating on low-frequency thickness C-mode was chosen as the temperature sensor because of its availability and its good linear frequency versus temperature characteristic. In order to reduce the mounting effects and to decouple interfering modes of motion, the contour structures of the quartz wafers having a biconvex type and bat metallic electrodes with the sine ripple on the surfaces of the quartz wafer are used. The resonance frequency was analyzed by three-dimensional Finite Element Method and the results are compared with the theoretical values whenever they are available. Using low-cost oscillators connected to a microcontroller, a precise measurement system of temperature is implemented. Experimentally, the accuracy of measurement is better than 0.05 degree C (The errors include non-linearity, reproducibility and influence of load temperature) over the temperature range -60 degree C to 200 degree C.

The miniature frequency-temperature sensor based on quartz tuning fork resonators with a new ZYtw-cut and vibrating in the flexural mode has been described. The resonance frequency of a quartz tuning fork crystal was comprehensively analyzed by an analytical method, Sezawa's approximations and the finite element method. The influence of the sensor structural dimension on the resonant frequency and structural modes is investigated, which offers reliable basis for the structure design tuning fork geometry, tine electrode pattern and thickness of the micro quartz crystal tuning fork temperature sensor. The validity of calculated and simulated results is experimentally confirmed. The experimental results has shown that this new type of sensor with sensitivity about 0.001 degree C and accuracies 0.05 degree C within temperature range from -50 degree C to 200 degree C.

The property that the electric potential results in bone from strain of bone under stress is termed as the stress generated potential of bone. It is a key project to develop the piston-type pressure sensor for the experimental research into the stress generated dynamic potential in bone. The piston-type pressure sensor as a device to apply and measure force making it a key part for the whole research project. The current paper presents the research principle of the piston-type pressure sensor, the derivation of the relation between strength and strain and the technology for attaching and hardening the strain sheet.

Traditional cantilever accelerometer generally has the problems of mechanical friction and the distort invalidation of elements which the magnetic fluid (MF) acceleration sensor presented in this paper utilizing a moving magnet fully suspended in MF could solve. This MF sensor is simple in the mechanism with controllable measurement range and precision. The moving magnet was balanced by the repulsive force of magnet in axial and MF second-order buoyancy in radial respectively. Its sensor model was brought forward and simplified to obtain its mathematical model. The MF magnetoviscous property that can realize the controllability of viscosity was discussed. The relations of sensor kinetic characteristic to various parameters including MF viscosity, acceleration and magnetic field energy were analyzed. The results show the moving trend is uniform under different acceleration. Through adjusting the magnetic field intensity to modify MF viscosity, it will get good astringency and keep balance time within 0.2s.

During the rehabilitation process of the post-stroke patients is conducted, their movements need to be localized and learned so that incorrect movement can be instantly modified or tuned. Therefore, tracking these movement becomes vital and necessary for the rehabilitative course. In the technologies of human movement tracking, the position prediction of human movement is very important. In this paper, we first analyze the configuration of the human movement system and choice of sensors. Then, The Kalman filter algorithm and its modified algorithm are proposed and to be used to predict the position of human movement. In the end, on the basis of analyzing the performance of the method, it is clear that the method described can be used to the system of human movement tracking.

This paper proposes a method of signal analysis for a semi-active suspension isolation system. A semi-active suspension isolation system is an efficient equipment for vibration isolation and noise reduction in a car. In order to achieve a good vibration isolation effect, it adjusts its damping characteristic according to the excitation signals caused by different road conditions. Thus the key technique of the control of a semi-active suspension isolation system is to classify the excitation signals and analyze them quickly in time. This paper puts forward a signal processing method for these signals. At first, these signals are subdivided into three types, the stationary signal, the non-stationary signal and random signals. Subsequently, it uses the short-time Fourier transform (STFT) to handle them with different window functions in order to find the main frequency of the signal. Especially, the dynamic trend of the main frequency has to be considered for non-stationary signals. The two main parameters of the main frequency of the excitation signal, namely the position and the amplitude, will be obtained by the signal analysis. Then the control system can use them to give the best damping ratio for the damper. Finally, the method is used in a two-stage semi-active vibration isolation system to verify its effect. The experimental results show that it can analyze the signal exactly in time, and obviously enhance the vibration isolation performance of the semi-active suspension isolation system.

In this paper, a novel technique is presented to measure temperature and axial displacement of turbine blades simultaneously with a single sensor probe, by using non-contact measurement method. The heat radiation property of high temperature objects and the principle of optical fiber transducers in pyrometry are described. Based on the basic principle of colorimetric measurement, a fiber-optic temperature sensor is selected, in view of its high measurement accuracy and practicability, which is suitable for hostile environments. For dynamic external surface measurement, a new reflective intensity-modulated displacement sensor with a simple and reliable structure is proposed. In this project, the main elements for the sensor, circuit system and single chip ADuC848 are discussed. Especially, a concentric multi-circle fiber bundle is used in the sensor probe, which is designed on the basis of the required temperature measurement range and displacement measurement range.

A kind of fluorescence optic-fiber temperature sensor is devised based on the alexandrite crystal. In this system, a new optic- fiber probe fabrication techniques is proposed. This system is particularly adapted to the temperature measurement in the range of room temperature to 650°C. During the cause of experimentation, using the PLD-PMTR (termed the Pulse Modulated Phase-locked detection with Two References) signal processing scheme. This temperature measurement method is proved to be effective and useful for its highly resolution and precision. It ensured the detected fluorescence signal to noise ratio was high enough to be measurable when the temperature is raised to 650°C.

A kind of fluorescence optic-fiber sensor is devised based on the crystal fluorescence material. The characteristic of fluorescence material absorption and emission is analysis, and the optic-fiber temperature measurement probe based on LiSrAlF₆:Cr³⁺ is developed. This system is particularly adapted to the temperature measurement in the range of 20°C to 50°C. During the cause of experimentation, this temperature measurement method is proved to be effective and useful for its highly resolution and precision.

Wireless sensor network is a novel network with a large of nodes through wireless communication for information measurement in distributing area. The temperature measurement through wireless sensor network can get temperature in distributing area without costly infrastructure. In order to realize temperature measurement in wireless communication, the wireless sensor network technology is utilized in the measurement. The wireless sensor node with Atmega128L is introduced. The sensor ERT-J1VR103J is used to induce temperature. The performance of temperature sensor is analyzed. The temperature is gotten by the microprocessor Atmega128L, and then is sent through radio chip CC2420. The wireless sensor network operation system TinyOS is used in the application. The wireless gateway node based on GPRS is utilized in the remote wireless temperature measurement system through Internet network. The user node receives data from gateway to acquire temperature. The experimental result is gotten and the accuracy of temperature is 0.1 Celsius degree with relative accuracy is 0.1 percent. The result indicates that the temperature measurement system through wireless sensor network is reliable, convenient, and low cost.