Topography measurements and applications

Junfeng Song; Theodore Vorburger

doi:10.1117/12.716162

13 October 2006 Topography measurements and applications

Junfeng Song, Theodore Vorburger

Proceedings Volume 6280, Third International Symposium on Precision Mechanical Measurements; 62801T (2006) https://doi.org/10.1117/12.716162
Event: Third International Symposium on Precision Mechanical Measurements, 2006, Urumqi, China

Abstract

Based on auto- and cross-correlation functions (ACF and CCF), a new surface parameter called profile (or topography) difference, D_s, has been developed for quantifying differences between 2D profiles or between 3D topographies with a single number. When D_s = 0, the two compared 2D profiles or 3D topographies must be exactly the same (point by point). A 2D and 3D topography measurement system was established at NIST. This system includes data acquisition stations using a stylus instrument and a confocal microscope, and a correlation program using the proposed parameters D_s and the cross-correlation function maximum CCF_max. Applications in forensic science and surface metrology are described; those include profile signature measurements for 40 NIST Standard Reference Material (SRM) 2460 standard bullets, and comparisons of profile measurements with four different techniques. An approach to optimizing the Gaussian filter long wavelength cutoff, λc, is proposed for topography measurements.

Citation Download Citation

Junfeng Song and Theodore Vorburger "Topography measurements and applications", Proc. SPIE 6280, Third International Symposium on Precision Mechanical Measurements, 62801T (13 October 2006); https://doi.org/10.1117/12.716162

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