25 October 2006 Design, modeling, and simulation of quartz-crystal-tuning-fork-resonators-based micro temperature sensor
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Proceedings Volume 6280, Third International Symposium on Precision Mechanical Measurements; 62801B (2006) https://doi.org/10.1117/12.716148
Event: Third International Symposium on Precision Mechanical Measurements, 2006, Urumqi, China
Abstract
The miniature frequency-temperature sensor based on quartz tuning fork resonators with a new ZYtw-cut and vibrating in the flexural mode has been described. The resonance frequency of a quartz tuning fork crystal was comprehensively analyzed by an analytical method, Sezawa's approximations and the finite element method. The influence of the sensor structural dimension on the resonant frequency and structural modes is investigated, which offers reliable basis for the structure design tuning fork geometry, tine electrode pattern and thickness of the micro quartz crystal tuning fork temperature sensor. The validity of calculated and simulated results is experimentally confirmed. The experimental results has shown that this new type of sensor with sensitivity about 0.001 degree C and accuracies 0.05 degree C within temperature range from -50 degree C to 200 degree C.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jun Xu, Rongqiang Chi, Bo You, Xin Li, Haiying Wang, Hong Ai, "Design, modeling, and simulation of quartz-crystal-tuning-fork-resonators-based micro temperature sensor", Proc. SPIE 6280, Third International Symposium on Precision Mechanical Measurements, 62801B (25 October 2006); doi: 10.1117/12.716148; https://doi.org/10.1117/12.716148
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