Fractal anaylsis and modeling for NiCrAu MEMS micromirror surfaces

Xiaodong Xu; Yuan Luo; Yi Zhang

doi:10.1117/12.716178

13 October 2006 Fractal anaylsis and modeling for NiCrAu MEMS micromirror surfaces

Xiaodong Xu, Yuan Luo, Yi Zhang

Proceedings Volume 6280, Third International Symposium on Precision Mechanical Measurements; 628020 (2006) https://doi.org/10.1117/12.716178
Event: Third International Symposium on Precision Mechanical Measurements, 2006, Urumqi, China

Abstract

Micro-mirror is the key structure of MEMS optical switch, Digital Mirror Display (DMD) and variable optical attenuators. Surface roughness plays a crucial rule in reflectivity, insertion loss, and all kinds of surface forces. For describing the topography of surfaces, there are several roughness parameters. Some parameters depend on sample size and instrument resolutions while fractal theory, which is characterized by continuity, non-differentiability and self-affinity, shows its complementarities. In this paper, the topographies of various micro-mirror surfaces are measured by Scanning Tunneling Microscope (STM). Then, these rough surfaces are charactering by a fractal theory, and a three-dimensional Weierstrass-Mandelbrot function is applied to simulate the topography of the rough surfaces. The result shows that the Weierstrass-Mandelbrot function is efficient in creating models and analysis the topography of MEMS surface. It will be very useful in the future researches.

Citation Download Citation

Xiaodong Xu, Yuan Luo, and Yi Zhang "Fractal anaylsis and modeling for NiCrAu MEMS micromirror surfaces", Proc. SPIE 6280, Third International Symposium on Precision Mechanical Measurements, 628020 (13 October 2006); https://doi.org/10.1117/12.716178

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available