13 October 2006 Error separating and correcting method of nanometer two-dimensional working table
Author Affiliations +
Proceedings Volume 6280, Third International Symposium on Precision Mechanical Measurements; 62802S (2006) https://doi.org/10.1117/12.716299
Event: Third International Symposium on Precision Mechanical Measurements, 2006, Urumqi, China
Abstract
The designing principle's analysis and the structure design using modern accuracy design concept of nanometer two dimension working table are introduced. The source of the uncertainty is overall analyzed. The error separating and correcting method is designed. The influence on the measurement result of the autocollimator and the interferometer produced by the angle error of the orthogonal prism is analyzed on principle. The preview experiments are done. The results indicate that the light path deflection using orthogonal prism has no influence on the error separating result, but without absolute zero position has obvious influence on the error separating result. The error correcting result shows that the precision demand of nanometer two-dimensional working table can be met.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hongtao Yang, Yetai Fei, Xiaohuai Chen, Qi Wang, Feixiang Jin, "Error separating and correcting method of nanometer two-dimensional working table", Proc. SPIE 6280, Third International Symposium on Precision Mechanical Measurements, 62802S (13 October 2006); doi: 10.1117/12.716299; https://doi.org/10.1117/12.716299
PROCEEDINGS
8 PAGES


SHARE
Back to Top