22 June 2006 Composite microstructures for optical data storage
Author Affiliations +
Proceedings Volume 6282, Optical Data Storage 2006; 628207 (2006) https://doi.org/10.1117/12.685166
Event: Optical Data Storage 2006, 2006, Montréal, Canada
We design and fabricate polarization-dependent components (PDCs) based on all-dielectric, fully planarized, multilayer microstructures of 150 nm period by using low-loss materials. Quarter-wave and half-wave phase plates at 405 nm are presented. Wafer-level retardation within +/-7deg of the targets and wavefront distortion at 10mm-aperture <20mλ rms are achieved. We also discussed the reliability of various composite microstructures. Stress-test up to 2000 hours at 85°C and 85% relative humidity confirmed that even air-channeled microstructures surpass very stringent reliability requirements. Multifunction integrated diffractive PDCs are discussed.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Xuegong Deng, Xuegong Deng, Xiaoming Liu, Xiaoming Liu, Paul Sciortino, Jr., Paul Sciortino, Jr., Jian J. Wang, Jian J. Wang, Anguel Nikolov, Anguel Nikolov, Feng Liu, Feng Liu, Lei Chen, Lei Chen, Sebastian Fiorillo, Sebastian Fiorillo, Nada O'Brien, Nada O'Brien, } "Composite microstructures for optical data storage", Proc. SPIE 6282, Optical Data Storage 2006, 628207 (22 June 2006); doi: 10.1117/12.685166; https://doi.org/10.1117/12.685166

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