22 June 2006 Near-field induced polarization imaging for optical data storage metrology
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Proceedings Volume 6282, Optical Data Storage 2006; 62820D (2006) https://doi.org/10.1117/12.685172
Event: Optical Data Storage 2006, 2006, Montréal, Canada
Abstract
Near-field induced polarization imaging with a solid immersion lens (SIL) is used to provide high lateral resolution compared with conventional far-field microscopy. In addition, a new technique is used to obtain height information from the near-field induced polarization (cross polarized) image. Several optical data storage samples, including DVD-R, DVD-RW, BD-RW, are studied with this imaging technique. A calibration target indicates an accuracy of ±2nm for obtaining height information.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Tao Chen, Tao Chen, Tom D. Milster, Tom D. Milster, } "Near-field induced polarization imaging for optical data storage metrology", Proc. SPIE 6282, Optical Data Storage 2006, 62820D (22 June 2006); doi: 10.1117/12.685172; https://doi.org/10.1117/12.685172
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