5 September 2006 The fabrication of micro lens controlled by high voltage
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Abstract
Micro-optical elements are becoming more and more important in both consumer and industrial products. Developments such as the tunable liquid lens and the silicon laser will lead to further development of these technologies. In this paper we shall discuss a method that enables perturbation of the shape of a UV curable liquid droplet using an applied electrostatic field. This method provides a novel method for the control of the pre-cured lens profile and hence the final solid lens optical properties. This method also allows the fabrication of aspheric lenses using the UV-curable technique with the degree of aspericity controlled in real time by varying the applied electric field. The analysis of this fabrication method requires the development of an accurate in-situ lens profile measurement system. A range of techniques can be used to examine the resulting solid lens including mechanical techniques such as Dektak and Talysurf profilometry and optical techniques such as laser profilometry and interferometric techniques. We note that in order to fully characterise this fabrication technique it is necessary to measure the surface profile of the lens both post-curing and also when it is in the liquid state. The method chosen to examine the liquid lens is interferometry. In this study the surface profile of the microlens is examined using a Mach-Zehnder interferometer. The development of this interferometric measurement system and the analysis software are discussed. The application of this system in examining the E-field induced perturbation of the UV curable resin lenses will also be discussed and initial attempts to control the optical properties of the lens by preshaping the lens using the E-Field technique are discussed.
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Ying Liu, Ying Liu, James P. Ryle, James P. Ryle, Unnikrishnan Gopinathan, Unnikrishnan Gopinathan, Alun J. Carr, Alun J. Carr, John T. Sheridan, John T. Sheridan, } "The fabrication of micro lens controlled by high voltage", Proc. SPIE 6289, Novel Optical Systems Design and Optimization IX, 62891B (5 September 2006); doi: 10.1117/12.680727; https://doi.org/10.1117/12.680727
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