Digital imaging of particulate contamination

Kenneth T. Luey; David P. Taylor; Dianne J. Coleman; Kelsey A. Folgner

doi:10.1117/12.678560

7 September 2006 Digital imaging of particulate contamination

Kenneth T. Luey, David P. Taylor, Dianne J. Coleman, Kelsey A. Folgner

Proceedings Volume 6291, Optical Systems Degradation, Contamination, and Stray Light: Effects, Measurements, and Control II; 62910J (2006) https://doi.org/10.1117/12.678560
Event: SPIE Optics + Photonics, 2006, San Diego, California, United States

Abstract

The use of digital cameras and digital imaging software for the measurement of particle obscuration is discussed. Novel calibration standards are used to evaluate the sensitivity and accuracy of commercially available digital cameras for detecting microscopic dust particles and other contaminant features on surfaces. Lighting and illumination effects are also illustrated and discussed. The digital image histogram of particles on a surface is shown to give good results for the percent area coverage.

Citation Download Citation

Kenneth T. Luey, David P. Taylor, Dianne J. Coleman, and Kelsey A. Folgner "Digital imaging of particulate contamination", Proc. SPIE 6291, Optical Systems Degradation, Contamination, and Stray Light: Effects, Measurements, and Control II, 62910J (7 September 2006); https://doi.org/10.1117/12.678560

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