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7 September 2006 A numerical evaluation of the correlation of surface cleanliness level and percent area coverage
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Abstract
The correlation of surface cleanliness defined by MIL-STD-1246B and the resulting geometric obscuration, or percent area coverage (PAC), was rigorously calculated by Ma, Fong, and Lee in 1989. This correlation is effective for surfaces that follow a distribution of particle sizes defined by a slope of -0.926. This evaluation extends the correlation of surface cleanliness level and PAC to a more generalized format, compatible with alternative distribution slopes. In addition, an attempt at determining the distribution slope from a defined slope and cleanliness level is presented.
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Radford L. Perry III "A numerical evaluation of the correlation of surface cleanliness level and percent area coverage", Proc. SPIE 6291, Optical Systems Degradation, Contamination, and Stray Light: Effects, Measurements, and Control II, 62910L (7 September 2006); https://doi.org/10.1117/12.679621
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