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7 September 2006 No such thing as σ: flowdown and measurement of surface roughness requirements
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Abstract
The standard use of the parameter σ for the rms surface roughness of optics has obscured the fact that the effective surface roughness is a function of both the measurement wavelength and bandwidth. A more appropriate method for the flowdown of surface specifications from stray light requirements is presented. Acceptance test methods for validating surface properties of optics using a Zygo NewView Profilometer are also discussed.
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Michael G. Dittman, Frank Grochocki, and Kathleen Youngworth "No such thing as σ: flowdown and measurement of surface roughness requirements", Proc. SPIE 6291, Optical Systems Degradation, Contamination, and Stray Light: Effects, Measurements, and Control II, 62910P (7 September 2006); https://doi.org/10.1117/12.678314
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