Detection and assessment of the nonuniform phase displacement error in temporal phase shifting interferometry

Krzysztof Patorski; Adam Styk; Luigi Bruno; Piotr Szwaykowski

doi:10.1117/12.679810

14 August 2006 Detection and assessment of the nonuniform phase displacement error in temporal phase shifting interferometry

Krzysztof Patorski, Adam Styk, Luigi Bruno, Piotr Szwaykowski

Author Affiliations +

Proceedings Volume 6292, Interferometry XIII: Techniques and Analysis; 629207 (2006) https://doi.org/10.1117/12.679810
Event: SPIE Optics + Photonics, 2006, San Diego, California, United States

Abstract

The paper deals with the calibration error of unequal phase changes across the interferogram in phase shifting interferometry, i.e., tilt-shift error. For its detection the lattice-site representation of phase shift angles is used. The error can be readily discerned using (N+1) algorithms. Four and five frame algorithms are considered. The influence of experimental parameters on the error detection sensitivity is discussed. Numerical studies are complemented by experimental results.

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Krzysztof Patorski, Adam Styk, Luigi Bruno, and Piotr Szwaykowski "Detection and assessment of the nonuniform phase displacement error in temporal phase shifting interferometry", Proc. SPIE 6292, Interferometry XIII: Techniques and Analysis, 629207 (14 August 2006); https://doi.org/10.1117/12.679810

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