14 August 2006 Nanometric displacement measurement using phase singularities in Laguerre-Gauss transform of speckle pattern
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Abstract
Contrary to the common belief of optical metrology, where the phase singularities are considered as obstacles in phase unwrapping, we propose a new technique that makes use of phase singularities in the complex signal representation of a speckle pattern as indicators of local speckle displacements. The complex signal representation is generated by Laguerre-Gauss filtering the dynamic speckle patterns. Experimental results are presented that demonstrate the validity and the performance of the proposed optical vortex metrology for lateral speckle displacement measurement with a large dynamic range.
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Wei Wang, Wei Wang, Tomoaki Yokozeki, Tomoaki Yokozeki, Reika Ishijima, Reika Ishijima, Steen G. Hanson, Steen G. Hanson, Mitsuo Takeda, Mitsuo Takeda, } "Nanometric displacement measurement using phase singularities in Laguerre-Gauss transform of speckle pattern", Proc. SPIE 6292, Interferometry XIII: Techniques and Analysis, 62920X (14 August 2006); doi: 10.1117/12.681307; https://doi.org/10.1117/12.681307
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