14 August 2006 A curvature sensor using white-light scanning interferometry
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We present a method of free-form surface profile measurement using white-light scanning interferometry. This method is based on the principle of curvature sensor which measures the local curvature under test along a line. The profile is then reconstructed from the curvature data on the each point. Unlike subaperture-stiching method and slope detection method curvature sensing have strong points from a geometric point of view in measuring the free-form surface profile. Curvature is related to second derivative terms of surface profile and an intrinsic property of the test piece, which is independent of its position and tip-tilt motion. The curvature is measured at every local area with high accuracy and high lateral resolution by using White-light scanning interferometry.
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ByoungChang Kim, ByoungChang Kim, SeHeon Kim, SeHeon Kim, YongKwan Kwon, YongKwan Kwon, YunWoo Lee, YunWoo Lee, HoSoon Yang, HoSoon Yang, HyugGyo Rhee, HyugGyo Rhee, } "A curvature sensor using white-light scanning interferometry", Proc. SPIE 6292, Interferometry XIII: Techniques and Analysis, 629219 (14 August 2006); doi: 10.1117/12.675925; https://doi.org/10.1117/12.675925


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