14 August 2006 Fast surface profiling using monochromatic phase and fringe order in white-light interferometry
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Abstract
The results of combining the wrapped phase with the fringe order of this phase to increase the precision of white-light interferometry at high scanning speed are presented. Monochromatic phase data are calculated using the Fourier method and the fringe order is determined using a general coherence peak sensing method. A wide scanning interval of 5λ/8 and a narrow-band color filter with a bandwidth of 70 nm are adopted to acquire interferograms. Experiments with an rms repeatability of step height measurement of below 1 nm and a scanning speed of 40 μm/s are performed.
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Chi-Hong Tung, Chi-Hong Tung, Chiung-Huei Huang, Chiung-Huei Huang, Ching-Fen Kao, Ching-Fen Kao, Calvin C. Chang, Calvin C. Chang, } "Fast surface profiling using monochromatic phase and fringe order in white-light interferometry", Proc. SPIE 6292, Interferometry XIII: Techniques and Analysis, 62921F (14 August 2006); doi: 10.1117/12.678899; https://doi.org/10.1117/12.678899
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