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14 August 2006 Interferometric testing through transmissive media (TTM)
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Abstract
The TTM objective module was designed to allow interferometric measurement of objects underneath transmissive materials at higher magnifications. For proper functioning, many factors must be optimized, including dispersive compensation, coherence effects, thickness variation insensitivity, and illumination. Measurement results will be presented for through glass, through fluid and dynamic MEMS application examples.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Sen Han "Interferometric testing through transmissive media (TTM)", Proc. SPIE 6293, Interferometry XIII: Applications, 629305 (14 August 2006); https://doi.org/10.1117/12.682089
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