Static and dynamic measurements of active MEMS by Twyman-Green interferometry: case of AlN-based microactuators

C. Gorecki; A. Andrei; M. Jozwik; K. Krupa; K. Dogheche; S. Balandras; L. Hirsinger; P. Delobelle

doi:10.1117/12.680691

14 August 2006 Static and dynamic measurements of active MEMS by Twyman-Green interferometry: case of AlN-based microactuators

C. Gorecki, A. Andrei, M. Jozwik, K. Krupa, K. Dogheche, S. Balandras, L. Hirsinger, P. Delobelle

Author Affiliations +

Proceedings Volume 6293, Interferometry XIII: Applications; 629308 (2006) https://doi.org/10.1117/12.680691
Event: SPIE Optics + Photonics, 2006, San Diego, California, United States

Abstract

This study presents static and dynamic characterisation by Twyman Green interferometry of two active MEMS actuators driven by a thin film transducer of aluminium nitride (AlN). Firstly, we report on the testing results of thin film AlN/Si piezoelectric micro-machined ultrasonic transducers. These devices are expected to exhibit sensing capabilities for monitoring fluid property changes. The goal of second case study is the development of reliable AlN driven cantilevers working as actuation elements in Micro-Electro-Mechanical Systems (MEMS).

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C. Gorecki, A. Andrei, M. Jozwik, K. Krupa, K. Dogheche, S. Balandras, L. Hirsinger, and P. Delobelle "Static and dynamic measurements of active MEMS by Twyman-Green interferometry: case of AlN-based microactuators", Proc. SPIE 6293, Interferometry XIII: Applications, 629308 (14 August 2006); https://doi.org/10.1117/12.680691

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