EPA 914 IR - A Positive Resist With Built-In Image Reversal (IR) Capabilities For Ulsi Technology

William F. Cordes III; David A. Sawoska; Allen C. Spencer; Edwin J. Turner

doi:10.1117/12.963648

9 July 1986 EPA 914 IR - A Positive Resist With Built-In Image Reversal (IR) Capabilities For Ulsi Technology

William F. Cordes III, David A. Sawoska, Allen C. Spencer, Edwin J. Turner

Proceedings Volume 0631, Advances in Resist Technology and Processing III; (1986) https://doi.org/10.1117/12.963648
Event: 1986 Microlithography Conferences, 1986, Santa Clara, United States

Abstract

In order to extend the use of the EPA 914 into the submicron range, using conventional lithographic production tools, a modified version, EPA 914 IR has been formulated which is expected to have a shelf-life stability approaching conventional positive resists and allowing it to operate in a "negative" mode, without requiring the IMTEC/YES approach. The lithographic evaluation of EPA 914 IR described herein considers the following lithographic properties using both the Micralign 600-552HT and the GCA DSW 6000: *1. Linewidth control for both isolated/group lines. *2. Depth of focus vs. CD. 3. Linewidth control for nominal,--1.00 micron lines/spaces. 4. The effect of the following process parameters on lithographic properties (1-3) will be considered as well: a) Initial exposure b) Post-exposure bake c) Flood exposure d) Develop condition(s)

Citation Download Citation

William F. Cordes III, David A. Sawoska, Allen C. Spencer, and Edwin J. Turner "EPA 914 IR - A Positive Resist With Built-In Image Reversal (IR) Capabilities For Ulsi Technology", Proc. SPIE 0631, Advances in Resist Technology and Processing III, (9 July 1986); https://doi.org/10.1117/12.963648

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