The Application Of Cem-420 In Photoresist Imaging Over Reflective Topographical Metal Substrate

Chunshing Chen; Sunny Cheng

doi:10.1117/12.963636

9 July 1986 The Application Of Cem-420 In Photoresist Imaging Over Reflective Topographical Metal Substrate

Chunshing Chen, Sunny Cheng

Proceedings Volume 0631, Advances in Resist Technology and Processing III; (1986) https://doi.org/10.1117/12.963636
Event: 1986 Microlithography Conferences, 1986, Santa Clara, United States

Abstract

This paper describes experiments on the effect of using contrast enhancement material, CEM-420, on photoresist imaging over an aluminum substrate on thermal oxide steps. Wafers with oxide step heights ranging from 0.4μm up to 1.04μm were used to explore the potential advantage in using CEM-420. Various thicknesses of CEM and photoresist were prepared to determine the combination that provides the best process parameters. A full factorial ex-periment with three levels of each of the three variables, PR, CEM, step, was performed. A minimum of three levels is required in order to reveal the curvilinear effects. Each combination received a different range of ten level exposure energies. The CD's at the top and bottom of the step were measured with a SEM. The data from experiments were analyzed by RSM, a software program from CompuServe. Regression analysis was used for model fitting. The effect of resist thickness, CEM thickness, step height, and exposure energy on CD is discussed. The required minimum print bias under different conditions for lμm line/space feature sizes on mask is discussed.

Citation Download Citation

Chunshing Chen and Sunny Cheng "The Application Of Cem-420 In Photoresist Imaging Over Reflective Topographical Metal Substrate", Proc. SPIE 0631, Advances in Resist Technology and Processing III, (9 July 1986); https://doi.org/10.1117/12.963636

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available