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30 August 2006 Multi-wavelength digital holographic metrology
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Abstract
A digital holographic metrology technique is described for measuring the three-dimensional shape of manufactured parts. The technique uses optical fibers to set up a near equal path interferometer, steps through multiple frequencies with a tunable laser, steps through multiple phases using a fiber based phase shifter, uses an off-axis parabolic mirror to collimate the light, and generates a digital hologram that leads to surface flatness measurements accuracies better than 1 micron over large surfaces. An example result for an automobile engine part is given using a Coherix Inc., ShapixTM 2000 instrument.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Carl C. Aleksoff "Multi-wavelength digital holographic metrology", Proc. SPIE 6311, Optical Information Systems IV, 63111D (30 August 2006); https://doi.org/10.1117/12.686727
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