24 August 2006 Miniature optical fiber sensor for pressure measurements
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Fiber optic extrinsic Fabry-Perot interferometric (EFPI) sensors are widely used in dynamic pressure measurements because of their inherent advantages including small size, light weight, high sensitivity, high frequency response, electrical passivity, electromagnetic interference immunity (EMI), and single-point measurement. However, small fluctuations of background pressure could shift the operating point of the sensor in an unpredictable way, which introduces a nonlinear response in dynamic pressure measurements. In this paper, we present a novel open structure only 125 μm in diameter to eliminate the operating point dependence on background pressure fluctuations. The essential element is a piece of hollow fiber, which connects a standard telecommunication fiber and another hollow fiber with a smaller inside diameter to form a Fabry-Perot cavity. The structure is open to the environment by a small hole, which allows gas exchange between the sensor cavity and the ambient atmosphere. On the other hand, the sensor is capable of responding to acoustic pressure because of the slow gas exchange through the small hole. In addition, this all fused silica structure features high temperature stability, good linearity, and high repeatability.
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Xingwei Wang, Xingwei Wang, Juncheng Xu, Juncheng Xu, Kristie L. Cooper, Kristie L. Cooper, Anbo Wang, Anbo Wang, "Miniature optical fiber sensor for pressure measurements", Proc. SPIE 6314, Photorefractive Fiber and Crystal Devices: Materials, Optical Properties, and Applications XII, 63141K (24 August 2006); doi: 10.1117/12.680866; https://doi.org/10.1117/12.680866

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