A hard x-ray KB-FZP microscope for tomography with sub-100-nm resolution

C. Rau; V. Crecea; C.-P. Richter; K. M. Peterson; P. R. Jemian; U. Neuhäusler; G. Schneider; X. Yu; P. V. Braun; T.-C. Chiang; I. K. Robinson

doi:10.1117/12.680975

7 September 2006 A hard x-ray KB-FZP microscope for tomography with sub-100-nm resolution

C. Rau, V. Crecea, C.-P. Richter, K. M. Peterson, P. R. Jemian, U. Neuhäusler, G. Schneider, X. Yu, P. V. Braun, T.-C. Chiang, I. K. Robinson

Author Affiliations +

Proceedings Volume 6318, Developments in X-Ray Tomography V; 63181G (2006) https://doi.org/10.1117/12.680975
Event: SPIE Optics + Photonics, 2006, San Diego, California, United States

Abstract

An instrument for high-resolution imaging and tomography has been built at the APS beamline 34 ID-C, Argonne National Laboratory. In-line phase contrast tomography can be performed with micrometer resolution. For imaging and tomography with resolution better than 100nm a hard X-ray microscope has been integrated to the instrument. It works with a Kirkpatrick-Baez (KB) mirror as condenser and a Fresnel-Zone plate (FZP) as an objective lens. 50 nm-features have been resolved in a Nickel structure operating the microscope at a photon energy of 9keV. Phase objects with negligible absorption contrast have been imaged. Tomography scans were performed on photonic crystals.

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C. Rau, V. Crecea, C.-P. Richter, K. M. Peterson, P. R. Jemian, U. Neuhäusler, G. Schneider, X. Yu, P. V. Braun, T.-C. Chiang, and I. K. Robinson "A hard x-ray KB-FZP microscope for tomography with sub-100-nm resolution", Proc. SPIE 6318, Developments in X-Ray Tomography V, 63181G (7 September 2006); https://doi.org/10.1117/12.680975

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