7 September 2006 Full-field and scanning microtomography based on parabolic refractive x-ray lenses
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Hard x-ray full field and scanning microscopy both greatly benefit from recent advances in x-ray optics. In full field microscopy, for instance, rotationally parabolic refractive x-ray lenses can be used as objective lens in a hard x-ray microscope, magnifying an object onto a detector free of distortion. Using beryllium as lens material, a hard x-ray optical resolution of about 100 nm has been obtained in a field of view of more than 500 micrometers. Further improvement of the spatial resolution to below 50 nm is expected. By reconstructing the sample from a series of micrographs recorded from different perspectives, tomographic imaging with a resolution well below one micrometer was achieved. The technique is demonstrated using a microchip as test sample. In scanning microscopy and tomography, the sample is scanned through a hard x-ray microbeam. Different hard x-ray analytical techniques can be exploited as contrast mechanism, such as x-ray fluorescence, absorption, or scattering. In tomographic scanning mode, they yield for example local elemental, chemical, or structural information from inside a specimen. At synchrotron radiation sources, a small and intensive microbeam can be generated by imaging the source onto the sample position in a strongly reducing geometry, e.g., by parabolic refractive x-ray lenses. With nanofocusing refractive x-ray lenses, a lateral beam size of 50 nm was reached. As an example for scanning tomography, we consider tomographic small angle x-ray scattering (SAXS-tomography), reconstructing a series of SAXS patterns related to small volume elements inside a polymer rod made by injection moulding.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
C. G. Schroer, M. Kuhlmann, T. F. Günzler, B. Benner, O. Kurapova, J. Patommel, B. Lengeler, S. V. Roth, R. Gehrke, A. Snigirev, I. Snigireva, N. Stribeck, A. Almendarez-Camarillo, F. Beckmann, "Full-field and scanning microtomography based on parabolic refractive x-ray lenses", Proc. SPIE 6318, Developments in X-Ray Tomography V, 63181H (7 September 2006); doi: 10.1117/12.680989; https://doi.org/10.1117/12.680989


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