Characterization of silicon-oxide interfaces and organic monolayers by IR-UV ellipsometry and FTIR spectroscopy

P. Hess; P. Patzner; A. V. Osipov; Z. G. Hu; D. Lingenfelser; P. Prunici; A. Schmohl

doi:10.1117/12.680344

11 September 2006 Characterization of silicon-oxide interfaces and organic monolayers by IR-UV ellipsometry and FTIR spectroscopy

P. Hess, P. Patzner, A. V. Osipov, Z. G. Hu, D. Lingenfelser, P. Prunici, A. Schmohl

Author Affiliations +

Proceedings Volume 6325, Physical Chemistry of Interfaces and Nanomaterials V; 63250H (2006) https://doi.org/10.1117/12.680344
Event: SPIE Optics + Photonics, 2006, San Diego, California, United States

Abstract

VUV-laser-induced oxidation of Si(111)-(1×1):H, Si(100):H, and a-Si:H at 157 nm (F₂ laser) in pure O₂ and pure H₂O atmospheres was studied between 30°C and 250°C. The oxidation process was monitored in real time by spectroscopic ellipsometry (NIR-UV) and FTIR spectroscopy. The ellipsometric measurements could be simulated with a three-layer model, providing detailed information on the variation of the suboxide interface with the nature of the silicon substrate surface. Besides the silicon-dioxide and suboxide layer, a dense, disordered, roughly monolayer thick silicon layer was included, as found previously by molecular dynamics calculations. The deviations from the classical Deal-Grove mechanism and the self-limited growth of the ultrathin dioxide layers (<6 nm) are described by different kinetic models for O₂ and H₂O. The tailored modification of silicon surfaces by functionalization with organic end groups was studied by silylation of oxidized silicon surfaces with terminating trimethylsilyl (TMS) groups and n-alkylthiol monolayers on gold-coated silicon. The C-H stretching vibrations of the methylene and methyl groups could be identified by FTIR spectroscopy and IR ellipsometry.

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P. Hess, P. Patzner, A. V. Osipov, Z. G. Hu, D. Lingenfelser, P. Prunici, and A. Schmohl "Characterization of silicon-oxide interfaces and organic monolayers by IR-UV ellipsometry and FTIR spectroscopy", Proc. SPIE 6325, Physical Chemistry of Interfaces and Nanomaterials V, 63250H (11 September 2006); https://doi.org/10.1117/12.680344

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