Reproduction of anti-reflection structures by nano casting method

Yoshihiko Hirai; Kenji Sogo; Masaki Nakajima; Hiroaki Kawata

doi:10.1117/12.680683

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31 August 2006 Reproduction of anti-reflection structures by nano casting method

Yoshihiko Hirai, Kenji Sogo, Masaki Nakajima, Hiroaki Kawata

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Proceedings Volume 6327, Nanoengineering: Fabrication, Properties, Optics, and Devices III; 63270Y (2006) https://doi.org/10.1117/12.680683
Event: SPIE Optics + Photonics, 2006, San Diego, California, United States

Abstract

Anti-reflection structure having sharpened corn shape is reproduced by nano casting method. Firstly, the master quartz structure is transferred to UV curable resin to fabricate the replicated mold of the master structure using nano casting method. Next, the anti-reflection structure is transferred to PMMA film using the replicated mold by the nano casting method. To avoid the defects at the mold releasing, thin sacrifice layer is coated on the replicated mold. Also, the molecular weight of the PMMA is optimized to improve the yield of the releasing process and transferred pattern shape. Fine anti-reflection structure is fabricated by the proposed process using the nano casting method without damages to the master structure.

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Yoshihiko Hirai, Kenji Sogo, Masaki Nakajima, and Hiroaki Kawata "Reproduction of anti-reflection structures by nano casting method", Proc. SPIE 6327, Nanoengineering: Fabrication, Properties, Optics, and Devices III, 63270Y (31 August 2006); https://doi.org/10.1117/12.680683

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