Translator Disclaimer
31 August 2006 Reproduction of anti-reflection structures by nano casting method
Author Affiliations +
Anti-reflection structure having sharpened corn shape is reproduced by nano casting method. Firstly, the master quartz structure is transferred to UV curable resin to fabricate the replicated mold of the master structure using nano casting method. Next, the anti-reflection structure is transferred to PMMA film using the replicated mold by the nano casting method. To avoid the defects at the mold releasing, thin sacrifice layer is coated on the replicated mold. Also, the molecular weight of the PMMA is optimized to improve the yield of the releasing process and transferred pattern shape. Fine anti-reflection structure is fabricated by the proposed process using the nano casting method without damages to the master structure.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yoshihiko Hirai, Kenji Sogo, Masaki Nakajima, and Hiroaki Kawata "Reproduction of anti-reflection structures by nano casting method", Proc. SPIE 6327, Nanoengineering: Fabrication, Properties, Optics, and Devices III, 63270Y (31 August 2006);

Back to Top