15 September 2006 Topological alignment of NLCs using nanoscale metallic grooves
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Proceedings Volume 6332, Liquid Crystals X; 63320H (2006) https://doi.org/10.1117/12.680299
Event: SPIE Optics + Photonics, 2006, San Diego, California, United States
Liquid crystal on silicon (LCoS) devices have been exploiting the ever-diminishing CMOS silicon process, which is pushing towards 45nm dimensions. Consequently, such fine metallic structures are bound to influence the alignment of the liquid crystal material. To illustrate this, a number of 1D metal patterns with differing mark-to-space ratio were fabricated using an Electron-Beam exposure technique. The results confirmed Dwight Berreman's topological alignment theory regarding the pitch of the surface topography and how this influences the quality of the planar alignment. Patterns with a metal to spacing ratio of 1:1 were shown to yield higher contrast ratios and hence better planar alignment. Such findings could be useful for developing non-intrusive alignment methods for nanoscale LCoS devices.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
R. Ghannam, N. Collings, W. Crossland, T. Wilkinson, "Topological alignment of NLCs using nanoscale metallic grooves", Proc. SPIE 6332, Liquid Crystals X, 63320H (15 September 2006); doi: 10.1117/12.680299; https://doi.org/10.1117/12.680299

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