A new self-mixing interferometer for micro-displacement reconstruction

Dongmei Guo; Ming Wang

doi:10.1117/12.695486

15 September 2006 A new self-mixing interferometer for micro-displacement reconstruction

Dongmei Guo, Ming Wang

Proceedings Volume 6341, Speckle06: Speckles, From Grains to Flowers; 634123 (2006) https://doi.org/10.1117/12.695486
Event: Speckle06: Speckles, From Grains to Flowers, 2006, Nimes, France

Abstract

A new self-mixing interferometer based on sinusoidal phase-modulating technique for micro-displacement reconstruction is presented in this paper. Phase modulation of the laser beam is obtained by an electro-optic modulator (EOM) in the external cavity. Fourier analysis method is proposed to demodulate the phase. The optimum values of the modulation frequency and modulation depth are discussed. Theoretical analysis and simulation results are given. Experimentally, the micro-movement of a high precision commercial PZT has been reconstructed, which can obtain a displacement measurement accuracy of a few nanometers.

Citation Download Citation

Dongmei Guo and Ming Wang "A new self-mixing interferometer for micro-displacement reconstruction", Proc. SPIE 6341, Speckle06: Speckles, From Grains to Flowers, 634123 (15 September 2006); https://doi.org/10.1117/12.695486

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