18 July 2006 The optical design for microlithographic lenses
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Proceedings Volume 6342, International Optical Design Conference 2006; 63421T (2006) https://doi.org/10.1117/12.692315
Event: International Optical Design Conference 2006, 2006, Vancouver, BC, Canada
Abstract
The evolution of the microlithographic lens is described based on an analysis of main features of the lenses in each generation. Even current lenses, comprising more than 20 elements, can be understandable through the analysis.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yasuhiro Ohmura, Yasuhiro Ohmura, } "The optical design for microlithographic lenses", Proc. SPIE 6342, International Optical Design Conference 2006, 63421T (18 July 2006); doi: 10.1117/12.692315; https://doi.org/10.1117/12.692315
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