10 June 2006 Laser plasmatron for CVD synthesis of diamond in open air
Author Affiliations +
Proceedings Volume 6344, Advanced Laser Technologies 2005; 63441N (2006) https://doi.org/10.1117/12.694418
Event: Advanced Laser Technologies 2005, 2005, Tianjin, China
Laser plasma technique for CVD synthesis of diamond in open air that dos not demand a vacuum or reaction chamber has been developed. Laser plasmatron, based on 3 kW cw CO2 laser and presented in this work, was used for CVD of diamond films on tungsten and molybdenum substrates with deposition area of about 3 - 4 times larger then plasma jet cross-section. Different modes of laser plasmatron operation with substrate movement relative to plasma core are considered. Possible directions of further investigation of laser-induced plasma CVD of diamond on large area are discussed.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
V. G. Naumov, V. G. Naumov, V. E. Cherkovetch, V. E. Cherkovetch, V. U. Dubrovckii, V. U. Dubrovckii, F. K. Kosyrev, F. K. Kosyrev, V. G. Vostrikov, V. G. Vostrikov, V. I. Konov, V. I. Konov, A. P. Bolshakov, A. P. Bolshakov, V. G. Ral'chenko, V. G. Ral'chenko, } "Laser plasmatron for CVD synthesis of diamond in open air", Proc. SPIE 6344, Advanced Laser Technologies 2005, 63441N (10 June 2006); doi: 10.1117/12.694418; https://doi.org/10.1117/12.694418


Micro CVD diamond heat sink
Proceedings of SPIE (August 08 2013)
Raman Spectroscopy Of Polycrystalline Diamond Films
Proceedings of SPIE (January 18 1988)
High rate chemical vapor deposition of diamond films by dc...
Proceedings of SPIE (November 30 1990)
Ultraviolet laser properties of diamond films by CVD
Proceedings of SPIE (September 04 2002)
Promise of diamond optics
Proceedings of SPIE (July 13 1995)

Back to Top