10 June 2006 Laser plasmatron for CVD synthesis of diamond in open air
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Proceedings Volume 6344, Advanced Laser Technologies 2005; 63441N (2006) https://doi.org/10.1117/12.694418
Event: Advanced Laser Technologies 2005, 2005, Tianjin, China
Abstract
Laser plasma technique for CVD synthesis of diamond in open air that dos not demand a vacuum or reaction chamber has been developed. Laser plasmatron, based on 3 kW cw CO2 laser and presented in this work, was used for CVD of diamond films on tungsten and molybdenum substrates with deposition area of about 3 - 4 times larger then plasma jet cross-section. Different modes of laser plasmatron operation with substrate movement relative to plasma core are considered. Possible directions of further investigation of laser-induced plasma CVD of diamond on large area are discussed.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
V. G. Naumov, V. G. Naumov, V. E. Cherkovetch, V. E. Cherkovetch, V. U. Dubrovckii, V. U. Dubrovckii, F. K. Kosyrev, F. K. Kosyrev, V. G. Vostrikov, V. G. Vostrikov, V. I. Konov, V. I. Konov, A. P. Bolshakov, A. P. Bolshakov, V. G. Ral'chenko, V. G. Ral'chenko, } "Laser plasmatron for CVD synthesis of diamond in open air", Proc. SPIE 6344, Advanced Laser Technologies 2005, 63441N (10 June 2006); doi: 10.1117/12.694418; https://doi.org/10.1117/12.694418
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