Development of a coupled numerical-experimental analysis based on laser Doppler vibrometry for the dynamic characterization of silicon-based micro paddle oscillators

B. Marchetti; J. F. Vignola; F. Cannella; T. Caso

doi:10.1117/12.693063

21 June 2006 Development of a coupled numerical-experimental analysis based on laser Doppler vibrometry for the dynamic characterization of silicon-based micro paddle oscillators

B. Marchetti, J. F. Vignola, F. Cannella, T. Caso

Author Affiliations +

Proceedings Volume 6345, Seventh International Conference on Vibration Measurements by Laser Techniques: Advances and Applications; 63451A (2006) https://doi.org/10.1117/12.693063
Event: Seventh International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, 2006, Ancona, Italy

Abstract

In this paper the mechanical characterization of a silicon based micro paddle oscillator by using a coupled experimental-numerical analysis is demonstrated. A Finite Element Model has been developed in order to study the mechanical behaviour of the system. The numerical model validation is performed by using the laser Doppler vibrometry technique that allows to dynamically characterize the systems: to find resonance frequencies, distinguish mode shapes, revealing the existence of all the vibrational modes, nonlinear behaviour and also to investigate the mechanism of mechanical energy dissipation that play a fundamental role in the performance of the devices (Quality factor assessment). This paper shows how a coupled experimental-numerical analysis produces a validate model that can be employed in order to detect the critical parameters (geometry, material and residual stress) that directly influence the performances of the oscillator and, in this way, to optimize the system design.

Citation Download Citation

B. Marchetti, J. F. Vignola, F. Cannella, and T. Caso "Development of a coupled numerical-experimental analysis based on laser Doppler vibrometry for the dynamic characterization of silicon-based micro paddle oscillators", Proc. SPIE 6345, Seventh International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, 63451A (21 June 2006); https://doi.org/10.1117/12.693063

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