Influence of electrode materials and surface roughness on the homogeneity of discharges in fluorine-based excimer laser gas mixtures

D. Mathew; H. M. J. Bastiaens; K.-J. Boller; P. J. M. Peters

doi:10.1117/12.738129

26 April 2007 Influence of electrode materials and surface roughness on the homogeneity of discharges in fluorine-based excimer laser gas mixtures

D. Mathew, H. M. J. Bastiaens, K.-J. Boller, P. J. M. Peters

Author Affiliations +

Proceedings Volume 6346, XVI International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers; 63460Q (2007) https://doi.org/10.1117/12.738129
Event: XVI International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers, 2006, Gmunden, Austria

Abstract

The influence of electrode materials and surface roughness on the discharge homogeneity of F₂ based excimer laser gas mixtures is investigated in a small x-ray preionised discharge chamber. The temporal and spatial evolution of the discharge is monitored by taking photographs of the discharge luminosity with an ICCD camera. It is found that for the same surface roughness, discharges with nickel coated aluminum electrodes are more homogeneous than the discharges using chromium or gold coated aluminum, massive copper, aluminum, brass and steel electrodes. Moreover, the surface roughness of copper electrodes does not have a large influence on the homogeneity of discharges in F₂ doped excimer laser gas discharges.

Citation Download Citation

D. Mathew, H. M. J. Bastiaens, K.-J. Boller, and P. J. M. Peters "Influence of electrode materials and surface roughness on the homogeneity of discharges in fluorine-based excimer laser gas mixtures", Proc. SPIE 6346, XVI International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers, 63460Q (26 April 2007); https://doi.org/10.1117/12.738129

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