Low-debris efficient laser-produced plasma extreme ultraviolet source by use of a regenerative liquid microtarget containing tin nanoparticles

Takeshi Higashiguchi; Naoto Dojyo; Yusuke Senba; Sumihiro Suetake; Masahito Katto; Shoichi Kubodera

doi:10.1117/12.737382

26 April 2007 Low-debris efficient laser-produced plasma extreme ultraviolet source by use of a regenerative liquid microtarget containing tin nanoparticles

Takeshi Higashiguchi, Naoto Dojyo, Yusuke Senba, Sumihiro Suetake, Masahito Katto, Shoichi Kubodera

Author Affiliations +

Proceedings Volume 6346, XVI International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers; 63460S (2007) https://doi.org/10.1117/12.737382
Event: XVI International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers, 2006, Gmunden, Austria

Abstract

We demonstrated a debris-free, efficient laser-produced plasma extreme ultraviolet (EUV) source by use of a regenerative liquid microjet target containing tin-dioxide (SnO₂) nano-particles. By using a low SnO₂ concentration (6%) solution and dual laser pulses for the plasma control, we observed the EUV conversion efficiency of 1.2% with undetectable debris.

Citation Download Citation

Takeshi Higashiguchi, Naoto Dojyo, Yusuke Senba, Sumihiro Suetake, Masahito Katto, and Shoichi Kubodera "Low-debris efficient laser-produced plasma extreme ultraviolet source by use of a regenerative liquid microtarget containing tin nanoparticles", Proc. SPIE 6346, XVI International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers, 63460S (26 April 2007); https://doi.org/10.1117/12.737382

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available