20 October 2006 Modeling of selected transducer designs for optical pressure sensors using polarization interferometry
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Proceedings Volume 6348, Optoelectronic and Electronic Sensors VI; 634802 (2006) https://doi.org/10.1117/12.721019
Event: Optoelectronic and Electronic Sensors VI, 2006, Zakopane, Poland
Abstract
Results of Finite Element modeling of selected designs of membranes for interferometric pressure sensors are presented in the paper. Dependence of characteristics on the choice of materials, dimensions and shape of the membrane is discussed. Analysed membranes have somewhat limited displacement range, which may affect the accuracy of pressure sensors in which they are employed. Directions of further research on interferometric pressure sensors are also outlined.
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Pawel Wierzba, Pawel Wierzba, "Modeling of selected transducer designs for optical pressure sensors using polarization interferometry", Proc. SPIE 6348, Optoelectronic and Electronic Sensors VI, 634802 (20 October 2006); doi: 10.1117/12.721019; https://doi.org/10.1117/12.721019
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