M(O)EMS-based integrated micro-interferometric system

Jerzy Krezel; Leszek Salbut; Małgorzata Kujawinska

doi:10.1117/12.721029

20 October 2006 M(O)EMS-based integrated micro-interferometric system

Jerzy Krezel, Leszek Salbut, Małgorzata Kujawinska

Proceedings Volume 6348, Optoelectronic and Electronic Sensors VI; 63480M (2006) https://doi.org/10.1117/12.721029
Event: Optoelectronic and Electronic Sensors VI, 2006, Zakopane, Poland

Abstract

In the paper idea of integrated waveguide micro-interferometric system is presented. Results of numerical simulation of beam propagation (geometrical and wave depiction) in the measurement interferometric module is presented. Article also briefly presents laboratory setups, which are used to model the interferometers.

Citation Download Citation

Jerzy Krezel, Leszek Salbut, and Małgorzata Kujawinska "M(O)EMS-based integrated micro-interferometric system", Proc. SPIE 6348, Optoelectronic and Electronic Sensors VI, 63480M (20 October 2006); https://doi.org/10.1117/12.721029

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