20 October 2006 Incoming database verification and management for mask data preparation
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We have developed a database verification and management system to ensure incoming database accuracy before mask data prep (MDP) and optimize computing resource. The system includes incoming database pre-check (IDPCS), backup/restore management functions and CPU resource management, which is queue manager system (QM). To ensure database accuracy through pre-check function can reduce data confirmation time and prevent data prep re-work if using un-excepting database. CPU resource management function has the possibility to optimize computing resource. Backup/Restore function presents automatic archive concept for data management.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Frank F. Chen, Casper W. Lee, Jason C. Lin, "Incoming database verification and management for mask data preparation", Proc. SPIE 6349, Photomask Technology 2006, 63493U (20 October 2006); doi: 10.1117/12.685916; https://doi.org/10.1117/12.685916


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