20 October 2006 Incoming database verification and management for mask data preparation
Author Affiliations +
Abstract
We have developed a database verification and management system to ensure incoming database accuracy before mask data prep (MDP) and optimize computing resource. The system includes incoming database pre-check (IDPCS), backup/restore management functions and CPU resource management, which is queue manager system (QM). To ensure database accuracy through pre-check function can reduce data confirmation time and prevent data prep re-work if using un-excepting database. CPU resource management function has the possibility to optimize computing resource. Backup/Restore function presents automatic archive concept for data management.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Frank F. Chen, Casper W. Lee, Jason C. Lin, "Incoming database verification and management for mask data preparation", Proc. SPIE 6349, Photomask Technology 2006, 63493U (20 October 2006); doi: 10.1117/12.685916; https://doi.org/10.1117/12.685916
PROCEEDINGS
8 PAGES


SHARE
RELATED CONTENT

Parallel processing approaches in RET and MDP new hybrid...
Proceedings of SPIE (December 17 2003)
Operating a petabyte class archive at ESO
Proceedings of SPIE (July 12 2008)
Distributed data archive systems for Subaru Telescope
Proceedings of SPIE (January 02 2002)
Toshiba Optical Disk Stores 15000 CT Images
Proceedings of SPIE (August 03 1984)
Distributed processing in integrated data preparation flow
Proceedings of SPIE (December 06 2004)

Back to Top