20 October 2006 Incoming database verification and management for mask data preparation
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Abstract
We have developed a database verification and management system to ensure incoming database accuracy before mask data prep (MDP) and optimize computing resource. The system includes incoming database pre-check (IDPCS), backup/restore management functions and CPU resource management, which is queue manager system (QM). To ensure database accuracy through pre-check function can reduce data confirmation time and prevent data prep re-work if using un-excepting database. CPU resource management function has the possibility to optimize computing resource. Backup/Restore function presents automatic archive concept for data management.
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Frank F. Chen, Frank F. Chen, Casper W. Lee, Casper W. Lee, Jason C. Lin, Jason C. Lin, } "Incoming database verification and management for mask data preparation", Proc. SPIE 6349, Photomask Technology 2006, 63493U (20 October 2006); doi: 10.1117/12.685916; https://doi.org/10.1117/12.685916
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