20 October 2006 Advanced femtosecond DUV laser mask repair tool for large area photomasks
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Abstract
In this paper we report for the first time on the development and performance of commercially available large area photomask repair tools of the MRT series. MRT+1500 / MRT+2000 are advanced laser-based tools specifically designed to repair high quality FPD (LCD & PDP) binary photomasks of Generations 6, 7, and beyond. MRT+2000 is the world's first commercial tool capable of handling and repairing Gen 7 photomasks with sizes up to two meters. Another unique feature of these tools is that they use a single DUV femtosecond laser to repair both opaque and clear defects with submicron laser spot size while a proprietary gantry motion system supports nanometer-scale accuracy and stability for edge lock. Key tool specifications, system architecture, design parameters, and laser processing specifics are discussed.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Leon Treyger, Leon Treyger, Jon Heyl, Jon Heyl, Michael Fink, Michael Fink, Iztok Koren, Iztok Koren, Yonggang Li, Yonggang Li, Donald Ronning, Donald Ronning, Farrell Small, Farrell Small, Bin Xian, Bin Xian, } "Advanced femtosecond DUV laser mask repair tool for large area photomasks", Proc. SPIE 6349, Photomask Technology 2006, 63494G (20 October 2006); doi: 10.1117/12.686505; https://doi.org/10.1117/12.686505
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