Reticle carrier material as ESD protection

Dirk Helmholz; Michael Lering

doi:10.1117/12.685926

20 October 2006 Reticle carrier material as ESD protection

Dirk Helmholz, Michael Lering

Proceedings Volume 6349, Photomask Technology 2006; 634952 (2006) https://doi.org/10.1117/12.685926
Event: SPIE Photomask Technology, 2006, Monterey, California, United States

Abstract

This report addresses the question of material conductivity (electrically isolating/dissipative/conductive) of reticle carrier and the reticle contact points in reticle carriers and its effect in protecting the reticle from field induced electrostatic discharge damage (ESD). Materials with different electrical properties were investigated; tests included measurements of surface resistivity, resistance to ground, charging, field induced and shielding efficiency. The impact of different materials on protecting reticles from ESD is also studied in an experimental setup using ESD sensitive CANARY^TM reticles. A recommendation of ESD protection through material choice and its electrical properties is given.

Citation Download Citation

Dirk Helmholz and Michael Lering "Reticle carrier material as ESD protection", Proc. SPIE 6349, Photomask Technology 2006, 634952 (20 October 2006); https://doi.org/10.1117/12.685926

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