4 October 2006 UV-written buried waveguides in benzocyclobutene
Author Affiliations +
Proceedings Volume 6351, Passive Components and Fiber-based Devices III; 63511J (2006) https://doi.org/10.1117/12.688685
Event: Asia-Pacific Optical Communications, 2006, Gwangju, South Korea
We demonstrate a simple UV-writing technique for the fabrication of buried waveguides using a UV lamp as the source and benzocyclobutene (BCB) and epoxy OPTOCAST 3553 as the waveguide materials. We find that the refractive index of the core material BCB can be increased by as much as 0.01 after UV exposure, while the refractive index of the cladding material epoxy OPTOCAST 3553 is not affected by the UV light. Based on these material properties, buried channel waveguide devices are formed by UV irradiation of an epoxy-clad BCB slab waveguide through a mask. We demonstrate the technique with a straight single-mode waveguide, a Y-junction waveguide branch, and a long-period waveguide grating. The propagation loss of the waveguide fabricated by this technique is 1.8 dB/cm at 1550 nm and the polarization-dependent loss is 0.15 dB/cm.
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Kin Seng Chiang, Kin Seng Chiang, Kar Pong Lor, Kar Pong Lor, Qing Liu, Qing Liu, Hau Ping Chan, Hau Ping Chan, } "UV-written buried waveguides in benzocyclobutene", Proc. SPIE 6351, Passive Components and Fiber-based Devices III, 63511J (4 October 2006); doi: 10.1117/12.688685; https://doi.org/10.1117/12.688685


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