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5 October 2006 Influence of etching slope on two-dimensional photonic crystal slab resonators
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Proceedings Volume 6352, Optoelectronic Materials and Devices; 63520P (2006)
Event: Asia-Pacific Optical Communications, 2006, Gwangju, South Korea
The influence of etching slope on cavity Q-factors in two-dimensional (2D) photonic crystal (PhC) slab is studied. Through FDTD simulation, it is confirmed that the Q-factor decreases with etching slope. The main loss comes from the horizontal coupling into propagating TM-modes. We designed three-lattice-long modified linear cavities having high Q-factors. However, the measured Q-factor was about 250. This small Q-factor is attributed to the non-vertical (13°) side wall.
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Myung-Ki Kim, In-Kag Hwang, Jin-Kyu Yang, and Yong-Hee Lee "Influence of etching slope on two-dimensional photonic crystal slab resonators", Proc. SPIE 6352, Optoelectronic Materials and Devices, 63520P (5 October 2006);

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