Holographic nanolithography techniques for the fabrication of microcavity arrays

Jeonghoi Kim; Changsu Kim; Haewook Han

doi:10.1117/12.691633

6 October 2006 Holographic nanolithography techniques for the fabrication of microcavity arrays

Jeonghoi Kim, Changsu Kim, Haewook Han

Proceedings Volume 6352, Optoelectronic Materials and Devices; 63523T (2006) https://doi.org/10.1117/12.691633
Event: Asia-Pacific Optical Communications, 2006, Gwangju, South Korea

Abstract

Two-dimensional (2D) photonic quasicrystals (PQCs) were fabricated by a holographic nanolithography technique. Using two laser beams with different angles incident on the sample, microcavities with 2D internal nanostructures are patterned with a few micrometer periods.

Citation Download Citation

Jeonghoi Kim, Changsu Kim, and Haewook Han "Holographic nanolithography techniques for the fabrication of microcavity arrays", Proc. SPIE 6352, Optoelectronic Materials and Devices, 63523T (6 October 2006); https://doi.org/10.1117/12.691633

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