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6 October 2006 Holographic nanolithography techniques for the fabrication of microcavity arrays
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Proceedings Volume 6352, Optoelectronic Materials and Devices; 63523T (2006) https://doi.org/10.1117/12.691633
Event: Asia-Pacific Optical Communications, 2006, Gwangju, South Korea
Abstract
Two-dimensional (2D) photonic quasicrystals (PQCs) were fabricated by a holographic nanolithography technique. Using two laser beams with different angles incident on the sample, microcavities with 2D internal nanostructures are patterned with a few micrometer periods.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jeonghoi Kim, Changsu Kim, and Haewook Han "Holographic nanolithography techniques for the fabrication of microcavity arrays", Proc. SPIE 6352, Optoelectronic Materials and Devices, 63523T (6 October 2006); https://doi.org/10.1117/12.691633
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