6 October 2006 Holographic nanolithography techniques for the fabrication of microcavity arrays
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Proceedings Volume 6352, Optoelectronic Materials and Devices; 63523T (2006) https://doi.org/10.1117/12.691633
Event: Asia-Pacific Optical Communications, 2006, Gwangju, South Korea
Abstract
Two-dimensional (2D) photonic quasicrystals (PQCs) were fabricated by a holographic nanolithography technique. Using two laser beams with different angles incident on the sample, microcavities with 2D internal nanostructures are patterned with a few micrometer periods.
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Jeonghoi Kim, Jeonghoi Kim, Changsu Kim, Changsu Kim, Haewook Han, Haewook Han, } "Holographic nanolithography techniques for the fabrication of microcavity arrays", Proc. SPIE 6352, Optoelectronic Materials and Devices, 63523T (6 October 2006); doi: 10.1117/12.691633; https://doi.org/10.1117/12.691633
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