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21 September 2006 Holographic technique of generating large-size mask with hexagonal pattern for photonic crystal LED fabrication
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Proceedings Volume 6355, Advanced LEDs for Solid State Lighting; 63550X (2006) https://doi.org/10.1117/12.687899
Event: Asia-Pacific Optical Communications, 2006, Gwangju, South Korea
Abstract
A simple optical system for generating large-size hexagonal lattice used as the mask for photonic crystal LED fabrication is proposed. The key element in the system is a holographic diffractive optical element consisting of three phase gratings made with holographic means. Under the illumination of a single plane wave, three plane waves can be generated and interfere to form a uniform hexagonal pattern. Theoretical analysis demonstrates that equal intensity of the three plane waves can be obtained if groove depth of the gratings is about 400 nm, which can be achieved by controlling the development time in grating processing. Mask on LED with lattice area up to 15 cm2 has been obtained with the method.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ying Liu, Xiangsu Zhang, and Shou Liu "Holographic technique of generating large-size mask with hexagonal pattern for photonic crystal LED fabrication", Proc. SPIE 6355, Advanced LEDs for Solid State Lighting, 63550X (21 September 2006); https://doi.org/10.1117/12.687899
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