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24 October 2006 3D profilometry system based on absolute phase calibration
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Abstract
Improvement of absolute phase calibration in phase-measuring profilometry is presented. In order to calculate the absolute phase of calibration plane, linear interpolation of unwrapping phase of reference point is introduced. Accuracy of height calibration and measurement is improved. A novel 3D surface shape measurement system is designed. Experiments of given height plane are presented. The mean of measurement error of conventional algorithm is about 0.5 mm. That of the novel algorithm introduced in this paper is reduced to about 0.2 mm.
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Hao Yu, Shuangyun Shao, Zhifeng Zhang, and Qibo Feng "3D profilometry system based on absolute phase calibration", Proc. SPIE 6357, Sixth International Symposium on Instrumentation and Control Technology: Signal Analysis, Measurement Theory, Photo-Electronic Technology, and Artificial Intelligence, 63570M (24 October 2006); https://doi.org/10.1117/12.716744
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