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6 November 2006 Nanoscale measurement technique of in-plane motion for MEMS based on phase correlation method
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Abstract
In order to measure motion characteristic and dynamic parameters of MEMS resonator in every moment based on the techniques of stroboscopic imaging clear motion images for every moment in one cycle are obtained. Using technique of Phase correlation method to process motion images of MEMS resonator the dynamic parameters are got. The results give important reference to MEMS designation. In this paper we derive a completely analytical N-cubed algorithm based on Phase correlation method. MEMS motion process is analyzed using the algorithm. The amplitude-phase curve of MEMS in special driving frequency is got. The phase-frequency character is also analyzed. And the amplitude-frequency curve is acquired through sweep frequency measurement. Experimental results indicate that the repetition of measurement is 5nm.
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Zhi Chen, Xiaodong Hu, Cuiyun Jin, and Ian Lan "Nanoscale measurement technique of in-plane motion for MEMS based on phase correlation method", Proc. SPIE 6357, Sixth International Symposium on Instrumentation and Control Technology: Signal Analysis, Measurement Theory, Photo-Electronic Technology, and Artificial Intelligence, 63573P (6 November 2006); https://doi.org/10.1117/12.717255
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